Micromechanical transducer

• US 5,408,355 A
• Filed: 10/30/1992
• Issued: 04/18/1995
• Est. Priority Date: 10/30/1991
• Status: Expired due to Term

• Current Assignee: CMS Mikrosystene GmbH Chemnitz
• Original Assignee: Labor Dr. Hans Steinbichler
• Inventors: Kiehnscherf, Richard, Markert, Joachim, Rauch, Manfred
• Primary Examiner(s): Goldstein, Herbert
• Assistant Examiner(s): BIEGEL, RONALD L
• Application Number:
  US07/969,799
• Time in Patent Office: 900 Days
• Field of Search: 73/861.043, 73/861.626, 73/861.624, 73/517 R, 73/517 B, 359/254, 359/290, 359/291, 359/846, 359/849
• US Class Current: 359/298
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 7/1827 Motorised alignment
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence

Abstract

There is disclosed a micromechanical transducer having only one moving or movable part (1) and a stator (2), the part (1) being movable in relation to the stator and in the form of a flat member which is connected by spring arrangements, such as springs (6), to the stator. The movable part is capable of three-dimensional movement to implement a deflection.

Claims

1. A micromechanical transducer capable of performing three-dimensional movement comprising a movable part (1) and a stator (2), said movable part (1) being supported in relation to said stator (2) by a spherical segment (4a,4b) and provided with a plurality of spring arrangements (6) attached to said stator (2), said movable part (1) being held over said stator (2) by said spherical segment (4a,4b);

said spherical segment (4a,4b) supporting said movable part (1) in a plane in spaced parallel disposition with respect to said stator (2); and

both said movable part (1) and said stator (2) having controllably energized electrodes (3) located thereon, whereby energization of said controllably energized electrodes (3) establishes electrostatic forces between said movable part (1) and said controllably energized electrodes (3) which forces impart three-dimensional movement to said movable part (1).

2. The micromechanical transducer according to claim 1 wherein the movable part (1) is a flat part.

3. The micromechanical transducer according to claim 1 wherein the movable part (1) has at least one beam reflecting surface on a side facing the stator (2).

4. The micromechanical transducer according to claim 1 wherein the movable part (1) has a cruciform configuration.

5. The micromechanical transducer according to claim 1 wherein the side of the movable part (1) facing the stator (2) is metallized.

6. The micromechanical transducer according to claim 1 wherein the controllably energized electrodes are arranged in a circular area.

7. The micromechanical transducer according to claim 1 wherein the controllably energized electrodes (3) are divided into sectors (15).

8. The micromechanical transducer according to claim 1 wherein the controllably energized electrodes (3) are divided into segments (16).

9. The micromechanical transducer according to claim 1 wherein the electrodes (3) are arranged in a symmetrical configuration.

10. The micromechanical transducer according to claim 1 wherein the movable part (1) is connected to the stator (2) by springs (6).

11. The micromechanical transducer according to claim 10 wherein the springs (6) extend in the same plane as the movable part (1).

12. The micromechanical transducer according to claim 10 wherein the springs (6) are flat springs.

13. The micromechanical transducer according to claim 10 employing four springs set at an angle of 90°

with respect to each other.

14. The micromechanical transducer according to claim 10 wherein the springs (6) have the same restoring force in three directional components and said three dimensional components extend perpendicularly to each other.

15. The micromechanical transducer according to claim 10 wherein the springs (6) have a meandering configuration.

16. The micromechanical transducer according to claim 1 wherein the distance between the movable part (1) and the stator (2) is adjustable.

17. The micromechanical transducer according to claim 1 wherein the movable part (1) is supported by a spherical surface (4a and 4b) in relation to the stator.

18. The micromechanical transducer according to claim 1 wherein the movable part 1 is a flat part and is supported by a sphere (4a) in relation to the stator (2).

19. The micromechanical transducer according to claim 17 wherein the movable part (1) is supported by a cylinder (4) provided with a spherical segment (4b) in relation to the stator 2.

20. The micromechanical transducer according to claim 19 wherein the cylinder (4) together with the spherical segment (4b) is movable in relation to the stator (2).

21. The micromechanical transducer according to claim 1 wherein the movable part (1) is provided with openings.

22. The micromechanical transducer according to claim 21 wherein the openings in the movable part (1) are aligned with openings provided in the stator (2).

23. The micromechanical transducer according to claim 1 wherein only the movable part (1) has controllably energized electrodes (3) located thereon.

24. The micromechanical transducer according to claim 23 wherein the controllably energized electrodes (3) are arranged in a circular area.

25. The micromechanical transducer according to claim 23 wherein the controllably energized electrodes (3) are divided into sectors (15).

26. The micromechanical transducer according to claim 23 wherein the controllably energized electrodes (3) are divided into segments (16).

27. The micromechanical transducer according to claim 23 wherein the electrodes (3) are arranged in a symmetrical configuration.

28. The micro mechanical transducer according to claim 1 wherein only the stator (2) has controllably energized electrodes (3) located thereon.

29. The micromechanical transducer according to claim 28 wherein the controllable energized electrodes (3) are arranged in a circular area.

30. The micromechanical transducer according to claim 28 wherein the controllably energized electrodes (3) are divided into sectors (15).

31. The micromechanical transducer according to claim 28 wherein the controllably energized electrodes (3) are divided into segments (16).

32. The micromechanical transducer according to claim 28 wherein the electrodes (3) are arranged in a symmetrical configuration.

33. The micromechanical transducer according to claim 1 wherein the movable part (1) has a stellate configuration.