Micromechanical transducer
First Claim
1. A micromechanical transducer capable of performing three-dimensional movement comprising a movable part (1) and a stator (2), said movable part (1) being supported in relation to said stator (2) by a spherical segment (4a,4b) and provided with a plurality of spring arrangements (6) attached to said stator (2), said movable part (1) being held over said stator (2) by said spherical segment (4a,4b);
- said spherical segment (4a,4b) supporting said movable part (1) in a plane in spaced parallel disposition with respect to said stator (2); and
both said movable part (1) and said stator (2) having controllably energized electrodes (3) located thereon, whereby energization of said controllably energized electrodes (3) establishes electrostatic forces between said movable part (1) and said controllably energized electrodes (3) which forces impart three-dimensional movement to said movable part (1).
3 Assignments
0 Petitions
Accused Products
Abstract
There is disclosed a micromechanical transducer having only one moving or movable part (1) and a stator (2), the part (1) being movable in relation to the stator and in the form of a flat member which is connected by spring arrangements, such as springs (6), to the stator. The movable part is capable of three-dimensional movement to implement a deflection.
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Citations
33 Claims
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1. A micromechanical transducer capable of performing three-dimensional movement comprising a movable part (1) and a stator (2), said movable part (1) being supported in relation to said stator (2) by a spherical segment (4a,4b) and provided with a plurality of spring arrangements (6) attached to said stator (2), said movable part (1) being held over said stator (2) by said spherical segment (4a,4b);
- said spherical segment (4a,4b) supporting said movable part (1) in a plane in spaced parallel disposition with respect to said stator (2); and
both said movable part (1) and said stator (2) having controllably energized electrodes (3) located thereon, whereby energization of said controllably energized electrodes (3) establishes electrostatic forces between said movable part (1) and said controllably energized electrodes (3) which forces impart three-dimensional movement to said movable part (1). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
- said spherical segment (4a,4b) supporting said movable part (1) in a plane in spaced parallel disposition with respect to said stator (2); and
Specification