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Apparatus for deposition of thin-film, solid state batteries

  • US 5,411,592 A
  • Filed: 06/06/1994
  • Issued: 05/02/1995
  • Est. Priority Date: 06/06/1994
  • Status: Expired due to Term
First Claim
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1. A multi-chambered deposition apparatus for depositing solid-state, thin-film battery materials onto substrate material, said apparatus including:

  • at least three distinct evacuable deposition chambers, said deposition chambers physically interconnected in series;

    the first of said deposition chambers adapted to deposit battery electrode material having a first polarity onto the substrate;

    the second of said deposition chambers adapted to deposit solid-state electrolyte material onto the battery electrode material deposited in the first chamber;

    the third of said deposition chambers adapted to deposit battery electrode material of the opposite polarity from that deposited in the first chamber; and

    at least two gas gates, each gas gate interconnecting two of said deposition chambers such that the substrate material is allowed to proceed from one deposition chamber to the next, while maintaining gaseous segregation between the chambers.

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