Apparatus for deposition of thin-film, solid state batteries
First Claim
1. A multi-chambered deposition apparatus for depositing solid-state, thin-film battery materials onto substrate material, said apparatus including:
- at least three distinct evacuable deposition chambers, said deposition chambers physically interconnected in series;
the first of said deposition chambers adapted to deposit battery electrode material having a first polarity onto the substrate;
the second of said deposition chambers adapted to deposit solid-state electrolyte material onto the battery electrode material deposited in the first chamber;
the third of said deposition chambers adapted to deposit battery electrode material of the opposite polarity from that deposited in the first chamber; and
at least two gas gates, each gas gate interconnecting two of said deposition chambers such that the substrate material is allowed to proceed from one deposition chamber to the next, while maintaining gaseous segregation between the chambers.
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Accused Products
Abstract
A multi-chambered deposition apparatus for depositing solid-state, thin-film battery materials onto substrate material. The apparatus minimally includes at least three distinct evacuable deposition chambers, which are physically interconnected in series. The first deposition chamber is adapted to deposit a layer of battery electrode material having a first polarity onto the substrate. The second deposition chamber is adapted to deposit a layer of solid-state electrolyte material onto the layer of battery electrode material deposited in the first chamber. The third deposition chamber is adapted to deposit a layer of battery electrode material having an opposite polarity from that deposited in the first chamber onto the solid-state electrolyte. The deposition chambers are interconnected by gas gates such that the substrate material is allowed to proceed from one deposition chamber to the next, while maintaining gaseous segregation between the chambers.
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Citations
15 Claims
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1. A multi-chambered deposition apparatus for depositing solid-state, thin-film battery materials onto substrate material, said apparatus including:
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at least three distinct evacuable deposition chambers, said deposition chambers physically interconnected in series; the first of said deposition chambers adapted to deposit battery electrode material having a first polarity onto the substrate; the second of said deposition chambers adapted to deposit solid-state electrolyte material onto the battery electrode material deposited in the first chamber; the third of said deposition chambers adapted to deposit battery electrode material of the opposite polarity from that deposited in the first chamber; and at least two gas gates, each gas gate interconnecting two of said deposition chambers such that the substrate material is allowed to proceed from one deposition chamber to the next, while maintaining gaseous segregation between the chambers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification