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Method of producing micromechanical devices

  • US 5,411,769 A
  • Filed: 09/29/1993
  • Issued: 05/02/1995
  • Est. Priority Date: 11/13/1990
  • Status: Expired due to Term
First Claim
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1. A method for producing a low surface energy wear resistant thin film on the surface of a micromechanical device comprising the steps of:

  • a) cleaning said device;

    b) activating the surface of said cleaned device;

    c) heating said activated surface;

    d) heating a source material to produce a vapor, wherein said source material is a long-chain aliphatic halogenated polar compound; and

    e) exposing said activated surface to said source material vapor to deposit a passivating layer on said surface.

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