Tapping atomic force microscope

• US 5,412,980 A
• Filed: 08/07/1992
• Issued: 05/09/1995
• Est. Priority Date: 08/07/1992
• Status: Expired due to Term

• Current Assignee: Bruker Nano, Inc. (Bruker Corporation)
• Original Assignee: Digital Instruments, Inc. (Veeco Instruments Incorporated)
• Inventors: Elings, Virgil B., Gurley, John A.
• Primary Examiner(s): Noland, Tom
• Application Number:
  US07/926,175
• Time in Patent Office: 1,005 Days
• Field of Search: 73/105, 73/579, 250/306, 250/307
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/34 Tapping mode
• CPC Class Codes: Y10S 977/849 with scanning probe
• CPC Class Codes: Y10S 977/851 Particular movement or positioning of scanning tip
• CPC Class Codes: Y10S 977/863 Atomic force probe
• CPC Class Codes: Y10S 977/881 Microscopy or spectroscopy, e.g. sem, tem

Abstract

An atomic force microscope in which a probe tip is oscillated at a resonant frequency and at amplitude setpoint and scanned across the surface of a sample in contact with the sample, so that the amplitude of oscillation of the probe is changed in relation to the topography of the surface of the sample. The setpoint amplitude of oscillation of the probe is greater than 10 nm to assure that the energy in the lever arm is much higher than that lost in each cycle by striking the sample surface, thereby to avoid sticking of the probe tip to the sample surface. Data is obtained based either on a control signal produced to maintain the established setpoint or directly as a function of changes in the amplitude of oscillation of the probe.

Claims

1. In a method of operating an atomic force microscope including a probe including a probe tip mounted on one end of a lever arm and wherein the probe tip is scanned across the surface of a sample and data resentative of the surface of the sample is gathered in relation to the positioning of the lever arm as the probe tip is scanned, the improvement comprising:

oscillating the probe tip at or near a resonant frequency of the probe or a harmonic of said resonant frequency and with a free oscillation amplitude A_o sufficiently great so that the oscillating probe tip does not stick to the surface of the sample when the oscillating probe tip contacts the surface of the sample;

positioning the oscillating probe tip so that the oscillating probe tip repeatedly taps the surface of the sample with the probe tip repeatedly contacting and breaking contact with the surface of the sample without sticking to the surface of the sample;

translating the oscillating probe tip across the surface of the sample with the oscillating probe tip repeatedly tapping the surface of the sample so that the oscillation amplitude of the probe tip is stably affected due to changes in topography of the surface of the sample; and

producing signals indicative of variations in the topography of the surface of the sample in relation to changes in the oscillation of the oscillating probe tip upon repeated tapping of the oscillating probe tip against the surface of the sample during translation of the oscillating probe tip across the surface of the sample.

20. The method according to claim 1 or 17, wherein said oscillating step comprises:

oscillating said probe tip at a harmonic resonant frequency of said probe of less than or equal to 2 MHz.

21. The method according to claims 1 or 17, wherein said step of producing signals comprises:

determining data values representative of the surface of the sample as a function of change in amplitude of oscillation of said probe tip.

22. The method according to claims 1 or 17, comprising:

controlling the distance between an opposite end of the lever arm opposite the probe tip and the sample so that the amplitude of oscillation of the probe tip is maintained essentially constant during said translating steps; and

said signal producing step comprising determining data values representative of the topography of the surface of the sample based on a control signal produced in said controlling step to maintain the amplitude of oscillation of the oscillating probe tip essentially constant.

23. The method according to claims 1 or 17, comprising:

a) oscillating said probe tip laterally adjacent a step in said sample; and

b) detecting the amplitude of oscillation of the probe tip as the probe tip taps a sidewall of the step.

24. The method according to claim 23, comprising:

mowing said probe tip vertically adjacent said step and repeating said steps a) and b) to obtain a vertical profile of said step. in said sample; and

b) detecting the amplitude of oscillation of the probe tip as the probe tip taps a sidewall of the step.

25. The method according to claim 23, comprising:

scanning said probe between opposed steps of a trench;

determining a width of the trench in relation to the amplitude of oscillation of the probe tip as the probe tip taps the opposed steps of the trench.

26. The method according to claims 1 or 17, comprising:

scanning said probe tip laterally across a trench while oscillating said probe tip laterally and measuring a maximum amplitude of oscillation of said probe tip during said scanning; and

determining a width of said trench as a function of the measured maximum oscillation.

27. The method according to claim 1 or 17, comprising:

using a probe tip which includes a magnetic material; and

measuring a change in the amplitude of oscillation of the probe tip due to a magnetic field at the surface of the sample to obtain a map of a magnetic characteristic of the sample surface.

28. The method according to claims 1 or 17, comprising:

using a lever arm having a strain gauge or a piezoelectric gauge; and

detecting a deflection of said lever arm in relation to an output of said strain gauge or said piezoelectric gauge. 45

2. In an atomic force microscope (AFM) wherein a probe including a probe tip mounted on a lever arm is scanned across the surface of a sample and data reflecting the surface of the sample is gathered in relation to positioning of the lever arm as the probe tip is scanned, the improvement comprising:

first transducer means for oscillating the probe tip with a free oscillation amplitude A_o sufficiently great, so that the oscillating probe tip does not stick to the surface of the sample'"'"'when the oscillating probe tip contacts the surface of the sample;

second transducer means for positioning the oscillating probe tip so that the oscillating probe tip repeatedly taps the surface of the sample, thereby repeatedly contacting and breaking contact without sticking to the surface of the sample, and and for translating the oscillating probe tip across the surface of the sample with the oscillating probe tip repeatedly tapping the surface of the sample such that the amplitude of oscillation of the probe tip is affected by repeatedly tapping the sample surface; and

means for monitoring the oscillation of the probe tip during translating of the oscillating probe tip to produce a signal indicative of variations in the topography of the surface of the sample in relation to changes in the oscillation of the oscillating probe tip during tapping against the surface of the sample and translation across the surface of the sample.

3. The AFM according to claim 2, comprising:

a fluid in which said sample surface and said probe are immersed.

4. The AFM according to claims 2 or 3, wherein said scanning means oscillates said probe at or near a resonant frequency of said probe.

5. The AFM according to claim 2, comprising:

means for oscillating said probe laterally adjacent a step in the sample; and

means for detecting the amplitude of oscillation of the probe tip resulting from the probe tip tapping the sidewall of the step.

6. The AFM according to claim 5, comprising:

means for moving said probe vertically adjacent said step and obtaining a vertical profile of said step.

7. The AFM according to claim 5, wherein:

said second transducer means comprises means for scanning said laterally oscillated probe between opposed steps of a trench; and

said monitoring means comprises means for determining a width of the trench as a function of changes in the amplitude of oscillation of the probe tip as the probe tip taps said opposed steps of the trench.

8. The AFM according to claim 2, comprising:

means for scanning said probe laterally across a trench while oscillating said probe and measuring a maximum amplitude of oscillation of said probe during said scanning; and

means for determining a width of said trench as a function of the measured maximum amplitude of oscillation and the width of the probe tip.

9. The AFM according to claim 2, wherein:

said lever arm comprises a strain gauge or a piezoelectric gauge; and

said means for determining data values determines data values in relation to an output of said stain gauge or piezoelectric gauge.

10. The AFM according to claim 2, wherein said monitoring means comprises:

means for determining data values as a function of changes in amplitude of oscillation of the probe tip.

11. The AFM according to claim 2, comprising:

feedback means for producing a control signal to control a distance between an end of said lever arm opposite said probe tip and said sample during translating of the probe tip to maintain the amplitude of oscillation of the probe tip essentially constant; and

said monitoring means comprising means for producing said signal indicative of surface topography based on the control signal produced by said feedback means to maintain the amplitude of oscillation of the probe.

12. The AFM according to claim 11, comprising:

output means for outputting said control signal as a function of position of said probe tip during translating of said probe tip.

13. In a method of operating an atomic force microscope including a probe including a probe tip mounted on one end of a lever arm and wherein the probe tip is scanned across a sample surface including a surface fluid layer, and data rpresentative of topography of the sample is gathered in relation to the positioning of the lever arm as the probe tip is scanned, the improvement comprising:

oscillating the probe tip at a free oscillation amplitude A₀ equal to or greater than 20 nanometers;

interacting the oscillating probe tip with the sample surface so that the oscillating probe tip contacts and breaks contact with the sample surface without sticking to the sample surface to produce changes in the oscillation as a function of the topography of the sample; and

producing signals representative of the topography of the sample in relation to the changes in the oscillation produced in said interacting step.

14. The method according to claim 13, wherein the oscillating step comprises oscillating the probe tip at a frequency of oscillation which is at or near a resonant frequency of the probe.

15. The method according to claim 13, wherein:

said interacting step comprises controlling the distance between an opposite end of the lever arm opposite the probe tip and the sample so that the amplitude of oscillation of the probe tip is essentially constant during scanning of the probe tip; and

said step of producing a signal comprises determining data values representative of the topography of the sample in relation to a control signal produced in said controlling step to maintain the amplitude of oscillation of the probe tip essentially constant.

16. The method according to claim 13, wherein said step of producing signals comprises:

determining data values representative of the topography of the sample in relation to changes in the amplitude of oscillation of said probe tip during scanning of said probe tip.

17. In a method of operating an atomic force microscope including a probe including a probe tip mounted on one end of a lever arm and wherein the probe tip is scanned across the surface of a sample and data representative of the surface of the sample is gathered in relation to the positioning of the lever arm as the probe tip is scanned, the improvement comprising:

oscillating the probe to produce a free oscillation amplitude Ao of the probe tip;

providing a body of fluid on the surface of the sample with a depth sufficiently great to cover said oscillating probe;

positioning the oscillating probe tip in the body of fluid so that the oscillating probe tip repeatedly taps the surface of the sample with the probe tip repeatedly contacting and breaking contact with the surface of the sample without sticking to the surface of the sample;

translating the oscillating probe tip in said body of fluid across the surface of the sample with the oscillating probe tip repeatedly tapping the surface of the sample so that the oscillation amplitude of the probe tip is stably affected due to changes in topography of the surface of the sample; and

producing signals indicative of variations in the topography of the surface of the sample in relation to changes in the oscillation of the oscillating probe tip upon repeated tapping of the oscillating probe tip against the surface of the sample during translation of the oscillating probe tip across the surface of the sample.

18. The method according to claim 17, wherein the free amplitude A_o is selected to be greater than 10 nanometers.

19. The method according to claim 18, wherein the free amplitude A_o is selected to be greater than or equal to 20 nanometers.