Electrostatic chuck

• US 5,413,360 A
• Filed: 12/01/1993
• Issued: 05/09/1995
• Est. Priority Date: 12/01/1992
• Status: Expired due to Term

• Current Assignee: Kyocera Corporation
• Original Assignee: Kyocera Corporation
• Inventors: Atari, Hitoshi, Kuchimachi, Kazuhiro
• Primary Examiner(s): Bishop, Steven C.
• Application Number:
  US08/160,685
• Time in Patent Office: 524 Days
• Field of Search: 279/128, 361/234, 269/8, 29/825, 29/829
• US Class Current: 279/128
• CPC Class Codes: B23Q 3/15 Devices for holding work using magnetic or electric force acting directly on the work
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means

Abstract

An electrostatic chuck comprising a chucking body of a dielectric ceramics and an electrostatic inner electrode embedded in the chuck (first invention), the ceramics having a volume resistivity value not more than 10¹³ Ωcm at a high temperature not less than 250° C. This electrostatic chuck can properly chuck, fix, carry and correct wafers even at a high temperature not less than 250° C. in CVD, PVD or high temperature etching apparatuses.

An electrostatic chuck comprising a chucking body of a single-crystalline sapphire and an electrostatic inner electrode embedded in the chuck (second invention). This electrostatic chuck is characterized by extremely small leak current, high mechanical strength and strong chucking force even in the temperature range of room temperature to 500° C. and in the voltage range of 500 to 2000 V. With this electrostatic chuck, objects to be chucked, such as silicon wafers, are less contaminated.

Claims

1. An electrostatic chuck, comprising:

a chuck body for generating a chucking force by means of minimal leak current, the chuck body comprising dielectric ceramic having a volume resistivity value not greater than approximately 10¹³ Ω

cm at a high temperature of not less than approximately 250°

C., and

an electrostatic inner electrode embedded in the chuck body.

2. The electrostatic chuck of claim 1, wherein the dielectric ceramic has a volume resistivity value not less than approximately 10⁸ Ω

cm.

3. The electrostatic chuck of claim 1, wherein the dielectric ceramic comprises a material selected from the group consisting of polycrystalline alumina ceramic, aluminum nitride ceramic and silicon nitride ceramic.

4. An electrostatic chuck, comprising:

a chuck body of dielectric ceramic, and

an electrostatic inner electrode embedded in the chuck body,

the dielectric ceramic having a volume resistivity value not greater than approximately 10¹³ Ω

cm at a high temperature of not less than approximately 250°

C., the dielectric ceramic comprising a material selected from the group consisting of polycrystalline alumina ceramic, aluminum nitride ceramic and silicon nitride ceramic, the dielectric ceramic comprising approximately 85 weight % of at least one of alumina, aluminum nitride and silicon nitride as a main ingredient and comprising not more than approximately 0.2 weight % of impurities other than aluminum, silicon, oxygen and nitrogen.

5. An electrostatic chuck, comprising:

a chuck body comprising a single-crystalline sapphire plate having a first surface and a second surface, the first surface of the sapphire plate forming a chucking surface having a surface roughness of not more than 0.8 S,

a dielectric plate, and

an electrostatic inner electrode for coupling the dielectric plate with the second surface of the sapphire plate.

6. The electrostatic chuck of claim 5, wherein the single-crystalline sapphire is formed in accordance with the Edge-defined Film-fed Growth (EFG) method.

7. The electrostatic chuck of claim 5, wherein the electrostatic inner electrode comprises at least one of a unipolar type electrode and a bipolar type electrode.

8. An electrostatic chuck for at least one of fixing and carrying semiconductor wafers at a high temperature of not less than approximately 250°

C., the electrostatic chuck comprising;

a chuck body for generating a chucking force by means of minimal leak current, the chuck body comprising dielectric ceramic having a volume resistivity value not greater than approximately 10¹³ Ω

cm at a high temperature of not less than approximately 250°

C., and

an electrostatic inner electrode embedded in the chuck body.

9. The electrostatic chuck of claim 8, wherein the dielectric ceramic comprises a material selected from the group consisting of polycrystalline alumina ceramic, aluminum nitride ceramic and silicon nitride ceramic.

10. An electrostatic chuck for at least one of fixing and carrying semiconductor wafers under a vacuum processing condition at a temperature ranging from approximately room temperature to approximately 500°

C., the electrostatic chuck comprising;

a chuck body comprising a single-crystalline sapphire plate having a first surface and a second surface, the first surface of the sapphire plate forming a chucking surface having a surface roughness of not more than 0.8 S,

a dielectric plate, and

an electrostatic inner electrode for coupling the dielectric plate with the second surface of the sapphire plate.

11. The electrostatic chuck of claim 10, wherein the processing condition comprises a high voltage ranging from approximately 500 V to 2000 V.

12. An electrostatic chuck according to any of claims 8 through 11, wherein the processing condition is a wafer processing condition selected from the group consisting of those for lithographic electron beam drawing, dry etching, chemical vapor deposition and physical vapor deposition methods.