Composite semiconductor substrate and a fabrication process thereof

• US 5,413,951 A
• Filed: 02/19/1993
• Issued: 05/09/1995
• Est. Priority Date: 02/19/1992
• Status: Expired due to Fees

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Sugimoto, Fumitoshi, Ohori, Tatsuya, Arimoto, Yoshihiro, Hanyu, Isamu
• Primary Examiner(s): Hearn, Brian
• Assistant Examiner(s): Picardat, Kevin M.
• Application Number:
  US08/019,888
• Time in Patent Office: 809 Days
• Field of Search: 437/61, 437/62, 437/21, 437/84, 437/974, 148/DIG. 12, 148/DIG. 150, 148/DIG. 135
• US Class Current: 438/479
• CPC Class Codes: H01L 21/2007 Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer H01L21/2011 takes precedence; bonding of semiconductor wafers to semiconductor wafers for junction formation H01L21/187
• CPC Class Codes: H01L 21/76256 using silicon etch back techniques, e.g. BESOI, ELTRAN
• CPC Class Codes: Y10S 148/135 Removal of substrate

Abstract

A method for fabricating an SOI structure which includes the steps of contacting a single crystal layer of a group III-V compound semiconductor material to a single crystal substrate of sapphire such that a principal surface of said single crystal layer establishes an intimate contact with a corresponding principal surface of said single crystal substrate and bonding the single crystal layer and the single crystal substrate with each other while elevating a temperature.

Claims

1. A method for fabricating as semiconductor-on-insulator structure that includes a single crystal layer of a group III-V first compound semiconductor material formed on a single crystal substrate of sapphire, said method comprising the steps of:

growing a plurality of epitaxial layers consecutively on a second substrate of a second compound semiconductor material to form a layered structure, wherein said single crystal layer is formed at one end of said layered structure and has an exposed first principal surface, said layered structure comprising an etching stopping layer such that said etching stopping layer has an etching rate different from those of the other ones of said plurality of epitaxial layers;

contacting the single crystal layer to the single crystal substrate of sapphire such that the first principal surface of said single crystal layer establishes an intimate contact with a second principal surface of said single crystal substrate;

bonding said single crystal layer and said single crystal substrate with each other at said mutually contacting first and second principal surfaces by elevating a temperature of said single crystal layer and said single crystal substrate such that a rearrangement of atoms occurs in said single crystal layer and in said single crystal substrate at least in correspondence to said mutually contacting first and second principal surfaces;

removing said second substrate and at least one of said plurality of epitaxial layers formed between said second substrate and said etching stopping layer by a first etching process; and

removing said etching stopping layer by a second etching process.

2. The method as claimed in claim 1, further comprising a step of reducing a thickness of said single crystal layer to a predetermined thickness after said step of removing said etching stopping layer.

3. The method as claimed in claim 2, wherein said step of reducing the thickness of said single crystal layer comprises the steps of:

mechanically lapping an exposed third principal surface of said single crystal layer opposite said first principal surface; and

chemically etching said exposed third principal surface.

4. The method as claimed in claim 1, wherein said single crystal layer is formed to have a thickness less than one-third of a thickness of said single crystal substrate, prior to said step of bonding.

5. The method as claimed in claim 4 wherein said single crystal layer has a thickness of at most 200 μ

m.

6. The method as claimed in claim 1, wherein said first compound semiconductor material essentially consists of GaAs.

7. The method as claimed in claim 1, wherein said first compound semiconductor material essentially consists of InP.

8. The method as claimed in claim 1, wherein said plurality of epitaxial layers comprise an AlGaAs layer and a GaAs layer.

9. The method as claimed in claim 1, wherein said plurality of epitaxial layers comprise an InGaP layer and a GaAs layer.

10. The method as claimed in claim 1, wherein said plurality of epitaxial layers comprise a GaAs layer, an AlGaAS layer and an InGaP layer.

11. The method as claimed in claim 1, wherein said plurality of epitaxial layers comprise an InP layer, an InGaAs layer, and an InAlAs layer.

12. The method as claimed in claim 1, wherein said step of bonding is conducted by elevating the temperature to a range between 500°

C. and 700°

C.

13. The method as claimed in claim 12, wherein said step of bonding is conducted by elevating the temperature to about 650°

C.

14. The method as claimed in claim 1, further comprising the step of applying a partial pressure of an element that constitutes the first compound semiconductor material at a level approximately equal to a partial equilibrium pressure of said element in said first compound semiconductor material during said step of bonding.

15. The method as claimed in claim 14, wherein the first compound semiconductor material contains arsenic, and said step of applying a partial pressure further comprises supplying an arsenic vapor with a partial pressure equivalent to the partial pressure of arsenic in said first compound semiconductor material.

16. The method as claimed in claim 1, further comprising the step of elevating the temperature up to 1100°

C., during said step of bonding.

17. The method as claimed in claim 1, further comprising the step of applying a pressure on said single crystal layer and said single crystal substrate such that said first and second principal surfaces are urged toward each other for intimate contact, during said step of bonding.

18. The method as claimed in claim 17, wherein said step of applying a pressure further comprises applying a d.c. voltage pulse across said single crystal substrate and said single crystal layer.

19. The method as claimed in claim 1, wherein said first and second compound semiconductor materials are the same material.