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Method for manufacturing a liquid crystal display substrate

  • US 5,413,958 A
  • Filed: 11/16/1993
  • Issued: 05/09/1995
  • Est. Priority Date: 11/16/1992
  • Status: Expired due to Term
First Claim
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1. A method of manufacturing a liquid crystal display substrate comprising a substrate, a plurality of semiconductor elements arranged in a pixel region of the substrate, and a plurality of drive circuit sections for driving the semiconductor elements, said method comprising the steps of:

  • forming an amorphous semiconductor film on said substrate;

    intermittently applying laser beam pulses having a cross section of predetermined dimensions, onto target surface regions of said amorphous semiconductor film, thereby changing said target surface regions into island-shaped polycrystalline regions having dimensions substantially identical to said predetermined dimensions;

    forming the drive circuit sections by using said island-shaped polycrystalline regions; and

    forming said semiconductor elements in said pixel region and electrically connecting said semiconductor elements to said drive circuit sections, by using parts of said amorphous semiconductor film.

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