Method of modifying transparent conductive oxide film including method of manufacturing photovoltaic device
First Claim
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1. A method of modifying a transparent conductive oxide film, comprising the steps of:
- emitting an energy beam from an energy beam generating device; and
irradiating said transparent conductive oxide film with said energy beam, thereby increasing the carrier concentration and reducing the resistance in said film.
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Abstract
In a method of modifying a transparent conductive oxide film and in a method of manufacturing a photovoltaic device, a transparent conductive oxide film is irradiated with an energy beam for increasing the carrier concentration and thereby reducing the resistance of the transparent conductive oxide film.
43 Citations
20 Claims
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1. A method of modifying a transparent conductive oxide film, comprising the steps of:
- emitting an energy beam from an energy beam generating device; and
irradiating said transparent conductive oxide film with said energy beam, thereby increasing the carrier concentration and reducing the resistance in said film. - View Dependent Claims (2, 3, 4, 5, 6, 20)
- emitting an energy beam from an energy beam generating device; and
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7. A method of manufacturing a photovoltaic device, comprising the steps of:
- forming a transparent conductive oxide film on a substrate;
irradiating said transparent conductive oxide film with an energy beam thereby increasing the carrier concentration and reducing the resistance in said film;
forming a photoelectric conversion layer having at least one p-n junction on said transparent conductive oxide film; and
forming an electrode film on said photoelectric conversion layer. - View Dependent Claims (8, 9, 10, 11, 12)
- forming a transparent conductive oxide film on a substrate;
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13. A method of manufacturing a photovoltaic device, comprising the steps of:
- forming an electrode film on a substrate;
forming a photoelectric conversion layer having at least one p-n junction on said electrode film;
forming a transparent conductive oxide film on said photoelectric conversion layer; and
irradiating said transparent conductive oxide film with an energy beam thereby increasing the carrier concentration and reducing the resistance in said film. - View Dependent Claims (14, 15, 16, 17, 18, 19)
- forming an electrode film on a substrate;
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