Acceleration sensor and process for its production

• US 5,415,043 A
• Filed: 02/04/1994
• Issued: 05/16/1995
• Est. Priority Date: 08/07/1991
• Status: Expired due to Term

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Widder, Johannes, Zabler, Erich
• Primary Examiner(s): POWELL, WILLIAM A
• Application Number:
  US08/190,144
• Time in Patent Office: 466 Days
• Field of Search: 156/628, 156/643, 156/655, 156/668, 73/517 AV, 73/517 A, 73/704, 200/61.45 R, 200/61.51, 361/283, 361/286, 361/296, 361/297, 361/298
• US Class Current: 73/514.38
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/13 Mechanical connectors, i.e. not functioning as an electrical connector
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: G01P 15/135 by making use of contacts which are actuated by a movable inertial mass
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 11/00 Apparatus or processes specially adapted for the manufacture of electric switches processes specially adapted for manufacture of rectilinearly movable switches having a plurality of operating members associated with different sets of contacts, e.g. keyboards, H01H13/88
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: H01H 2001/0078 with parallel movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 35/14 Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch wherein the liquid constitutes a contact of the switch H01H29/002
• CPC Class Codes: H01H 35/142 Damping means to avoid unwanted response
• CPC Class Codes: H01H 5/18 by flexing of blade springs
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

An acceleration sensor is used in particular for recognizing an impact experienced by a motor vehicle. The sensor has a spring-mass system (1) with at least one stable original position (4) and one stable deflection position (5). Upon acceleration in the measuring direction, the spring-mass system is initially deflected only slightly out of the original position (4). However, if a predetermined acceleration value is exceeded, then the spring-mass system (1) jumps into the deflection position (5), in which an electrical contact is closed.

Claims

1. An acceleration sensor for measuring an acceleration of a motor vehicle, comprising a spring-mass system responsive only to a component of the acceleration of the vehicle which is directed along an axis, the spring mass system including:

a plate-shaped substrate;

a seismic mass;

a contact block coupled to the substrate;

a bearing block coupled to the substrate; and

a spring coupled between the seismic mass and the bearing block so that a clearance exists between the spring and the substrate and between the seismic mass and the substrate, wherein the seismic mass, the spring and the bearing block are integrally formed of metal and wherein the spring, the seismic mass, the bearing block and the contact block define side walls which are substantially perpendicular to a surface of the substrate;

wherein the spring-mass system has an initial position and a deflection position in which a contact is closed between the seismic mass and the contact block, and wherein, upon an acceleration of the vehicle having a component along the axis of less than a predetermined magnitude, the spring-mass system deviates, along the axis, only slightly from the initial position and, upon an acceleration of the vehicle having a component along the axis greater than the predetermined magnitude, the spring-mass system is deflected along the axis to the deflection position and does not return to the initial position until the vehicle is subjected to an acceleration having a component along the axis greater than the predetermined magnitude and directed opposite to the previous acceleration.

2. A sensor according to claim 1, wherein one of the seismic mass and the contact block has a contact point, and wherein the contact point consists of different material than the material of which the other of the one of the seismic mass and the contact block is constructed.

3. A sensor according to claim 1, wherein the spring-mass system includes a plurality of springs and wherein the springs are formed as bending bars whose thickness is small in comparison to a length of the bending bars.

4. A sensor according to claim 3, wherein, when the spring-mass system is in the initial position, the springs are curved.

5. A sensor according to claim 4, wherein, when the spring-mass system is in the initial position, each spring is situated on a straight line, and wherein at least two springs are not parallel.

6. A sensor according to claim 5, wherein the spring-mass system includes a plurality of bearing blocks, and wherein the seismic mass is situated between the bearing blocks and is joined by a first spring to a first bearing block and is joined by a second spring to a second bearing block.

7. A sensor according to claim 1, wherein the spring-mass system includes an electrostatic actuator, which enables the spring-mass system to move from the initial position into the deflection position and from the deflection position into the initial position.

8. The sensor according to claim 7, wherein the electrostatic actuator includes comb-shaped, interlaced electrodes, which receive electric potentials.

9. A sensor according to claim 1, wherein the contact block includes a gap on a side facing one of the seismic mass and the spring, and wherein the gap between the contact block and the one of the seismic mass and the spring is slightly larger than the clearance between a contact point of the contact block and a contact point of the seismic mass.

10. A sensor according to claim 1, wherein the gap includes venting slits which project into one of the seismic mass and the contact block.

11. A sensor according to claim 10, further including means for applying an electric voltage between the contact block and one of the seismic mass and spring.

12. A process for producing an acceleration sensor for measuring an acceleration of a motor vehicle comprising the steps of:

providing, as a substrate, an insulating plate having a structured, conductive layer and a structured, dissolvable layer;

producing a plastic layer including a plurality of recesses on the substrate, wherein the recesses are partially situated on the dissolvable layer;

galvanically filling the recesses with a metal; and

thereafter, removing the plastic layer and the dissolvable layer.

13. A process according to claim 12, wherein the plastic layer including the plurality of recesses is produced by irradiating the plastic layer with X-rays and by selectively dissolving out the irradiated regions.

15. A process according to claim 12, wherein the plastic layer including the plurality of recesses is produced by molding plastic structures.

14. A process for producing an acceleration sensor for measuring an acceleration of a motor vehicle comprising the steps of:

providing, as a substrate, an insulating plate having a structured, conductive layer and a structured, dissolvable layer;

producing a plastic layer including a plurality of recesses on the substrate, wherein the recesses are partially situated on the dissolvable layer;

galvanically filling the recesses with a metal;

partially irradiating the plastic layer with X-ray radiation;

dissolving out the irradiated region selectively in relation to the non-irradiated region, to form a cavity;

filling the cavity with another metal; and

removing the plastic layer and the dissolvable layer.