Method of making a bridge-supported accelerometer structure

• US 5,415,726 A
• Filed: 12/21/1993
• Issued: 05/16/1995
• Est. Priority Date: 12/21/1993
• Status: Expired due to Term

• Current Assignee: Delphi Technologies, Inc. (BorgWarner Incorporated)
• Original Assignee: Delco Electronics Corporation (Motors Liquidation Co. GUC Trust)
• Inventors: Staller, Steven E., Logsdon, James H.
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): CHANG, JONI YUK YING
• Application Number:
  US08/170,955
• Time in Patent Office: 511 Days
• Field of Search: 156/629, 156/630, 156/633
• US Class Current: 216/2
• CPC Class Codes: G01P 15/0802 Details

Abstract

This invention includes a method of making a bridge-supported accelerometer structure. A first wafer is worked, preferably by bulk micromachining, to provide a proof mass supported by a thin membrane on all sides. The thin membrane has the same thickness as the bridges to be defined therein. The first wafer is bonded to a second wafer having a cavity formed therein. The first wafer is then worked, preferably by plasma etching, to delineate bridges in the thin membrane. The cavity in the second wafer provides damping of the proof mass which reduced bridge breakage as portions of the thin membrane are removed leaving the final bridge-supported accelerometer structure. Combining the two wafers together prior to delineating the bridge provides for handling and processing of a much less fragile structure than the first wafer alone with bridges delineated therein.

Claims

1. A method of making a bridge-supported accelerometer structure, the method comprising the steps of:

working a first wafer to provide a proof mass suspended from a support shoulder delineated in the first wafer, said proof mass being supported by a membrane extending from the support shoulder to the proof mass, the membrane having a thickness in a direction perpendicular to the plane of the proof mass, the thickness being approximately equal to a thickness of bridges subsequently formed from the membrane;

bonding the first wafer to a second wafer having a cavity formed therein to accommodate movement of the proof mass; and

selectively removing portions of the membrane along the perimeter of the proof mass so as to delineate the bridges, wherein the bridges extend from the support shoulder to the proof mass and the thicknesses of the bridges in the direction perpendicular to the plane of the proof mass are each approximately equal to the thickness of the membrane.

2. A method as set forth in claim 1 wherein the step of working the first wafer is accomplished by bulk micromachining.

3. A method as set forth in claim 1 wherein said step of selectively removing portions of the thin membrane comprises selectively plasma etching the thin membrane.