Integrated circuit having passive circuit elements

• US 5,416,356 A
• Filed: 09/03/1993
• Issued: 05/16/1995
• Est. Priority Date: 09/03/1993
• Status: Expired due to Term

• Current Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Staudinger, Joseph, Patterson, Howard W., Seely, Warren L.
• Primary Examiner(s): James, Andrew J.
• Assistant Examiner(s): BOWERS, COURTNEY
• Application Number:
  US08/115,833
• Time in Patent Office: 620 Days
• Field of Search: 257/531, 257/488, 257/533, 257/535, 257/536, 257/532, 257/534
• US Class Current: 257/531
• CPC Class Codes: H01L 27/08 including only semiconductor components of a single kind

Abstract

An integrated circuit is formed from a first layer of conductive material (30) which is separated from a second layer of conductive material (39) by a layer of dielectric material (36). The first layer of conductive material (30) is patterned to form a first plate (32, 59) of a capacitor (22, 50, 62, 72). An electrical interconnect (33, 63) is formed within the first plate (32, 59), respectively. A via (37) is formed in the layer of dielectric material (36). A second layer of conductive material (39) is patterned to form a second plate (42, 56, 66, 76) of the capacitor (22, 50, 62, 72) and a planar spiral inductor (21, 51, 61, 71). The planar spiral inductor (21, 51, 61, 71) is surrounded by the second plate (42, 56, 66, 76) of the capacitor (22, 50, 62, 72).

Claims

1. An integrated circuit, comprising:

a capacitor comprising first and second electrically conductive layers having a dielectric layer disposed therebetween; and

an inductor formed on the dielectric layer and substantially surrounded by the second electrically conductive layer.

2. An integrated circuit as claimed in claim 1, wherein the inductor is a circular shaped planar spiral inductor.

3. An integrated circuit as claimed in claim 1, wherein the inductor is a rectangular shaped planar spiral inductor.

4. An integrated circuit as claimed in claim 1, wherein the inductor has a first terminal electrically coupled to the second electrically conductive layer.

5. An integrated circuit as claimed in claim 4, wherein the inductor has a second terminal electrically coupled to the first electrically conductive layer.

6. An integrated circuit as claimed in claim 1, wherein the inductor has a first terminal electrically coupled to the first electrically conductive layer.

7. An integrated circuit as claimed in claim 1, wherein the second electrically conductive layer is shorted to a ground potential.