Generalized solids modeling for three-dimensional topography simulation
First Claim
1. A computer implemented method for deforming the shape of a geometric model of a workpiece, said geometric model comprised of one or more material solids, said method comprising the steps of:
- a) said computer constructing an original air solid, said original air solid positioned adjacent to and above said geometric model;
b) said computer providing deformation parameters to a deformation means, said deformation parameters corresponding to manufacturing parameters for said workpiece;
c) said computer constructing a modified air solid from said deformation parameters and said original air solid; and
d) said computer performing one or more boolean set operations between said modified air solid, said original air solid and said geometric model, said boolean set operations performed according to said deformation parameters.
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Abstract
A topography simulator using a "Generalized Solid Modeling (GSM) method" to simulate isotropic or anisotropic deposition and etch process steps on a workpiece. A solids modeling system that utilizes a boundary representation model for representing material object solids provides a basis for the topography simulator. A workpiece in the model is comprised of a collection of material solids. The present invention provides for accurately representing the interfaces of different material solids. The airspace above the top surface material is defined as an air solid. Boolean set operations between the various material solids and the air solid are performed to deform the wafer topography. The present invention further provides means for simulating an etch process step at the interface of materials with different etch rates.
101 Citations
11 Claims
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1. A computer implemented method for deforming the shape of a geometric model of a workpiece, said geometric model comprised of one or more material solids, said method comprising the steps of:
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a) said computer constructing an original air solid, said original air solid positioned adjacent to and above said geometric model; b) said computer providing deformation parameters to a deformation means, said deformation parameters corresponding to manufacturing parameters for said workpiece; c) said computer constructing a modified air solid from said deformation parameters and said original air solid; and d) said computer performing one or more boolean set operations between said modified air solid, said original air solid and said geometric model, said boolean set operations performed according to said deformation parameters. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A topography simulation system for simulating the changes to the topography of a workpiece during a manufacturing process step, said topography simulation system including a solids modeler wherein said workpiece is represented as one or more material solids, said topography simulation system including a computer, each of said one or more material solids having a structural representation including one or more faces, edges and vertices, a method for simulating the deformation of said workpiece undergoing an etch process step where a first material and a second material have different etch rates, said method comprising the steps of:
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a) said computer identifying an interface vertex point as being adjacent to said first material solid, said second material solid and an original air solid; b) said computer cloning said interface vertex point into a first split interface vertex corresponding to said first material solid, a second split interface vertex corresponding to said second material solid and a moving interface vertex; c) said computer replacing said adjacent interface vertex point in said air solid with said first split interface vertex, said second split interface vertex and said moving interface vertex; d) said computer constructing a modified air solid from said deformation parameters and said original air solid, said deformation parameters corresponding to manufacturing parameters for said manufacturing process step; and e) said computer performing boolean set difference operations between said modified air solid and each of said first material solid and said second material solid. - View Dependent Claims (8, 9, 10, 11)
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Specification