Process and apparatus for electronic control of the transfer and delivery of high purity chemicals

• US 5,417,346 A
• Filed: 07/15/1994
• Issued: 05/23/1995
• Est. Priority Date: 09/17/1990
• Status: Expired due to Term

• Current Assignee: Air Liquide Electronics US LP (Air Liquide SA)
• Original Assignee: Applied Chemical Solutions, Inc. (Tokyo Electron Limited)
• Inventors: Geatz, J. Tobin, Ferri, Edward T. Jr.
• Primary Examiner(s): Kashnikow, Andres
• Assistant Examiner(s): Bomberg, Kenneth
• Application Number:
  US08/275,958
• Time in Patent Office: 312 Days
• Field of Search: 137/205, 137/208, 137/209, 137/545, 222/1, 222/43, 222/56, 222/135, 222/152, 222/309, 222/318, 222/399, 222/59, 222/61, 222/71
• US Class Current: 222/61
• CPC Class Codes: B01F 2101/2204 Mixing chemical components in generals in order to improve chemical treatment or reactions, independently from the specific application
• CPC Class Codes: B01F 35/2217 Volume of at least one component to be mixed
• CPC Class Codes: B01F 35/882 using measuring chambers, e.g. volumetric pumps, for feeding the substances
• CPC Class Codes: B24B 37/04 designed for working plane surfaces
• CPC Class Codes: B67D 7/0272 specially adapted for transferring liquids of high purity
• CPC Class Codes: B67D 7/0283 specially adapted for transferring liquids of high purity
• CPC Class Codes: G01F 11/28 with stationary measuring chambers having constant volume during measurement
• CPC Class Codes: G01F 23/00 Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
• CPC Class Codes: G01F 23/02 by gauge glasses or other apparatus involving a window or transparent tube for directly observing the level to be measured or the level of a liquid column in free communication with the main body of the liquid
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: Y10T 137/3109 Liquid filling by evacuating container
• CPC Class Codes: Y10T 137/3124 Plural units
• CPC Class Codes: Y10T 137/3127 With gas maintenance or application

Abstract

The present invention provides improved method and apparatus for the transfer and delivery of very high purity chemicals for use in semiconductor production and similar processes. By employing a series of vessels arranged in parallel, a vacuum system to draw chemical from one or more bulk sources into the vessels, and a pressure system to deliver chemical under pressure from the vessels, chemicals can be easily delivered from any bulk source to one or more end-users. The use of a vacuum system to draw chemicals through sealed conduits eliminates the need for pumps which are a source of both maintenance problems and contamination in the system. Multiple vessels provide for a variety of flow options, which include continuous and uniform chemical delivery to the end-users, recirculation and regular filtration during periods of low use, and built-in redundancy to avoid system shut down if there is a component failure. Computer controlled process systems provides system flexibility and full automation.

Claims

1. An apparatus for providing chemical transfer and delivery of chemical from a bulk source to an end-use station which comprises

multiple vessels, each in fluid communication with the bulk source through a source conduit;

sensing means to detect the presence of chemical in each of the vessels and to provide an electronic signal in response thereto;

means to transfer chemical from the bulk source to each of the vessels, including a first electronically regulated valve to control chemical flow therethrough;

a delivery conduit from each vessel to the end-use station, including second electronically regulated valves associated with each vessel to control fluid flow from each vessel through the delivery conduit;

a pressure system in communication with each vessel to provide gas to pressurize each vessel, including third electronically regulated valves to control the flow of pressurized gas into each of the vessels, said pressure system providing pressurized gas motivation of chemical through the delivery conduit;

an electronic control system, said control system being adapted;

to receive and analyze signals from the sensing means on the vessels to determine whether a vessel is filled or empty;

to operate the first electronically regulated valve to provide for filling of each of the vessels from the bulk source when they are empty;

to operate third electronically regulated valves to provide for the pressurization of each of the vessels when they are filled with chemical; and

to operate the second electronically regulated valves to provide for flow of chemical from a filled vessel through the delivery conduit upon demand from the end-use station.

2. The apparatus of claim 1 which further comprises a recirculation system providing communication between each of the vessels and the bulk source, including a fourth electronically regulated valve to control fluid flow therethrough.

3. The apparatus of claim 2 wherein the electronic control system is further adapted to operate the fourth electronically controlled valve to provide for recirculation of chemical from a vessel to the bulk source during periods of low chemical demand.

4. The apparatus of claim 3 wherein at least one filter is provided to screen contamination from the chemical.

5. The apparatus of claim 4 wherein the delivery conduit and the recirculation system are common along a portion of their lengths, and the filter is provided on the common portion so as to provide screening of chemical during both chemical delivery and chemical recirculation.

6. The apparatus of claim 1 wherein at least one filter is provided to screen contamination from the chemical.

7. The apparatus of claim 1 wherein the sensing means includes a first electronic sensor indicating when each vessel is approaching full, a second electronic sensor indicating when each vessel has become completely filled, a third electronic sensor indicating when the vessel is approaching empty, and a fourth electronic sensor indicating when the vessel is completely empty.

8. The apparatus of claim 7 wherein the electronic control system receives and analyzes signals from the third electronic sensor to determine when a first vessel delivering chemical is approaching empty, and operates the second electronically regulated valve on a second vessel to provide for a short period of simultaneous delivery of chemical from the first and second vessels so as to provide uninterrupted and uniform flow to the end-use station.

9. The apparatus of claim 1 wherein the means to transfer chemical from the bulk source to each of the vessels includes a vacuum system which decompresses each of the vessels to draw chemical from the bulk source to the vessels.

10. The apparatus of claim 1 wherein the sensing means includes a high electronic sensor indicating when each vessel is approaching full, and a low electronic sensor indicating when the vessel is approaching empty.

11. The apparatus of claim 10 wherein the electronic control system receives and analyzes signals from the low electronic sensor to determine when a first vessel delivering chemical is approaching empty, and operates the second electronically regulated valve on a second vessel to provide for a short period of simultaneous delivery of chemical from the first and second vessels so as to provide uninterrupted and uniform flow to the end-use station.

12. An apparatus for transfer and delivery of chemical from a source to at least one use station which comprises

multiple vessels, each in fluid communication with the source through a source conduit;

sensing means to detect the presence of chemical in each of the vessels and to provide an electronic signal in response thereto;

means to transfer chemical from the source to each of the vessels, including a first electronically regulated valve to control chemical flow therethrough;

a delivery conduit from each vessel to the use station, including a second electronically regulated valve associated with each vessel to control fluid flow from each vessel through the delivery conduit;

a pressure system in communication with each vessel to provide gas to pressurize each vessel, including a third electronically regulated valve associated with each vessel to control the flow of pressurized gas into each of the vessels, said pressure system providing pressurized gas motivation of chemical through the delivery conduit;

an electronic control system, said control system being adapted;

to receive and analyze signals from the sensing means on the vessels to determine whether a vessel is filled or empty;

to operate the first electronically regulated valve to provide for filling of each of the vessels from the source when a vessel is empty;

to operate the third electronically regulated valves to provide for pressurization of each of the vessels when the vessel is filled with chemical; and

to operate the second electronically regulated valves to provide for flow of chemical from a filled vessel through the delivery conduit upon demand from the use station;

wherein the sensing means includes a high electronic sensor indicating when each vessel is approaching full, and a low electronic sensor indicating when the vessel is approaching empty; and

wherein the electronic control system receives and analyzes signals from the low electronic sensor to determine when a first vessel delivering chemical is approaching empty, and operates the second electronically regulated valve on a second vessel to provide for a short period of simultaneous delivery of chemical from the first and second vessels so as to provide uninterrupted and uniform flow to the use station.

13. The apparatus of claim 12 wherein the means to transfer chemical from the source to each of the vessels includes a vacuum system which decompresses each of the vessels to draw chemical from the source to the vessels.

14. The apparatus of claim 12 which further comprises a recirculation system providing communication between each of the vessels and the source, including a fourth electronically regulated valve to control fluid flow therethrough.

15. The apparatus of claim 14 wherein the electronic control system is further adapted to operate the fourth electronically controlled valve to provide for recirculation of chemical from a vessel to the source during periods of low chemical demand.

16. The apparatus of claim 14 wherein at least one filter is provided to screen contamination from the chemical.

17. The apparatus of claim 16 wherein the delivery conduit and the recirculation system are common along a portion of their lengths, and the filter is provided on the common portion so as to provide screening of chemical during both chemical delivery and chemical recirculation.

18. The apparatus of claim 12 wherein at least one filter is provided to screen contamination from the chemical.

19. The apparatus of claim 12 wherein the sensing means includes a redundant high level sensor and a redundant low level sensor.