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Process and apparatus for electronic control of the transfer and delivery of high purity chemicals

  • US 5,417,346 A
  • Filed: 07/15/1994
  • Issued: 05/23/1995
  • Est. Priority Date: 09/17/1990
  • Status: Expired due to Term
First Claim
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1. An apparatus for providing chemical transfer and delivery of chemical from a bulk source to an end-use station which comprisesmultiple vessels, each in fluid communication with the bulk source through a source conduit;

  • sensing means to detect the presence of chemical in each of the vessels and to provide an electronic signal in response thereto;

    means to transfer chemical from the bulk source to each of the vessels, including a first electronically regulated valve to control chemical flow therethrough;

    a delivery conduit from each vessel to the end-use station, including second electronically regulated valves associated with each vessel to control fluid flow from each vessel through the delivery conduit;

    a pressure system in communication with each vessel to provide gas to pressurize each vessel, including third electronically regulated valves to control the flow of pressurized gas into each of the vessels, said pressure system providing pressurized gas motivation of chemical through the delivery conduit;

    an electronic control system, said control system being adapted;

    to receive and analyze signals from the sensing means on the vessels to determine whether a vessel is filled or empty;

    to operate the first electronically regulated valve to provide for filling of each of the vessels from the bulk source when they are empty;

    to operate third electronically regulated valves to provide for the pressurization of each of the vessels when they are filled with chemical; and

    to operate the second electronically regulated valves to provide for flow of chemical from a filled vessel through the delivery conduit upon demand from the end-use station.

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