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Solid state ion sensor with polyimide membrane

  • US 5,417,835 A
  • Filed: 10/14/1993
  • Issued: 05/23/1995
  • Est. Priority Date: 06/23/1989
  • Status: Expired due to Fees
First Claim
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1. An integrated circuit chemical sensor arrangement comprising:

  • an input electrode formed of a conductive material in the vicinity of a region formed of a silicon-based semiconductor material; and

    a permselective membrane having an ion-selective electrochemical property and formed by dissolving a polyimide-based compound in a solvent with a plasticizer selected from the group consisting of dimethy phthalate (DMP) and diethylene glycol dibenzoate LDGD), and a neutral carrier ionophore and then removing said solvent, whereby said plasticizer and said neutral carder ionophore are uniformly distributed in said polyimide-based compound, said permselective membrane being arranged to be in adherence with said silicon-based semiconductor material and in electrical communication with said input electrode, for producing at said input electrode a voltage responsive to said electrochemical property, whereby said permselective membrane is formed of solidified polyimide.

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