Supersonic molecular beam etching of surfaces

• US 5,423,940 A
• Filed: 08/31/1993
• Issued: 06/13/1995
• Est. Priority Date: 11/01/1991
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Chen, Lee, Natzle, Wesley C., Jeng, Shwu-Jen, Yu, Chienfan
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): GOUDREAU, GEORGE A
• Application Number:
  US08/114,710
• Time in Patent Office: 651 Days
• Field of Search: 156/643, 156/345, 156/646, 118/715, 118/722, 427/600, 427/565
• US Class Current: 216/66
• CPC Class Codes: C23F 4/00 Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
• CPC Class Codes: H01L 21/31116 by dry-etching

Abstract

In supersonic molecular beam etching, the reactivity of the etchant gas and substrate surface is improved by creating etchant gas molecules with high internal energies through chemical reactions of precursor molecules, forming clusters of etchant gas molecules in a reaction chamber, expanding the etchant gas molecules and clusters of etchant gas molecules through a nozzle into a vacuum, and directing the molecules and clusters of molecules onto a substrate. Translational energy of the molecules and clusters of molecules can be improved by seeding with inert gas molecules. The process provides improved controllability, surface purity, etch selectivity and anisotropy. Etchant molecules may also be expanded directly (without reaction in a chamber) to produce clusters whose translational energy can be increased through expansion with a seeding gas.

Claims

1. A method of etching a structure with a supersonic molecular beam, comprising the steps of:

generating a supersonic molecular beam by expanding energetic reactant molecules through a nozzle into a vacuum;

creating said energetic reactant molecules at said nozzle by mixing and reacting individually stable precursor gases; and

directing said supersonic molecular beam onto a substrate.

2. A method as recited in claim 1 further comprising the step of seeding said energetic reactant molecules with non-reactive molecules.

4. A method as recited in claim 2 wherein said non-reactive molecules have a lower molecular weight that said energetic reactant molecules.

5. A method as recited in claim 1 further comprising the step of forming clusters of said energetic reactant molecules.

17. A method according to claim 1, wherein a first of said precursor gases comprises F₂.

18. A method according to claim 1, wherein a reaction is formed by an interaction between said energetic reactant molecules devoid of external activation, a product of said reaction being reactive with said substrate.

3. A method of etching a structure with a supersonic molecular beam, comprising the steps of:

generating a supersonic molecular beam by expanding reactant molecules through a nozzle into a vacuum;

creating said reactant molecules at said nozzle from precursor gases;

seeding said reactant molecules with non-reactive molecules; and

directing said supersonic molecular beam onto a substrate,

wherein said non-reactive molecules have a higher molecular weight than said reactant molecules.

6. A method of etching a structure with a supersonic molecular beam, comprising the steps of:

generating a supersonic molecular beam by expanding reactant molecules through a nozzle into a vacuum;

seeding said reactant molecules with non-reactive molecules; and

forming clusters of said reactant molecules with energy controlled by a non-reactive additive; and

directing said supersonic molecular beam onto a substrate.

8. A method as recited in claim 6 wherein said non-reactive molecules have a lower molecular weight than said reactant molecules in said clusters.

19. A method according to claim 6, wherein a reaction is formed by an interaction between said reactant molecules devoid of external activation, a product of said reaction being reactive with said substrate.

7. A method of etching a structure with a supersonic molecular beam, comprising the steps of:

generating a supersonic molecular beam by expanding reactant molecules through a nozzle into a vacuum;

forming clusters of said reactant molecules;

seeding said reactant molecules with non-reactive molecules; and

directing said supersonic molecular beam onto a substrate.

wherein said non-reactive molecules have a higher molecular weight than said reactant molecules in said clusters.

9. A method of etching a layer on a substrate layer, comprising the steps of:

introducing individually stable precursor gases into a reaction chamber where molecules of said precursor gases react to form an energetic reactant species;

generating a supersonic molecular beam by expanding said energetic reactant species through a nozzle into a vacuum; and

directing said supersonic molecular beam onto a portion of said layer on said substrate.

10. The method recited in claim 9, further comprising the steps of:

introducing a seeding gas into said chamber; and

expanding molecules of said seeding gas with said energetic species.

11. The method recited in claim 9 wherein said layer on said substrate is silicon dioxide and wherein said precursor gasses are selected from the group consisting of H₂, NH₃ and F₂.

12. The method recited in claim 9 further comprising the step of creating clusters of molecules in said reaction chamber.

13. The method recited in claim 12 wherein said clusters of molecules include said molecules of said energetic reactant species and molecules of said precursor gases, said step of generating said supersonic molecular beam co-expanding said energetic reactant species and said clusters of molecules through said nozzle.

20. A method according to claim 9, wherein a reaction is formed by an interaction between said energetic reactant species devoid of external activation, a product of said reaction being reactive with said portion of said layer of said substrate.

14. A method of etching a layer on a substrate, comprising the steps of:

forming clusters of etchant molecules in a chamber by mixing at least two gasses which reactively combine with each other;

generating a supersonic molecular beam by expanding said clusters of etchant molecules through a nozzle into a vacuum; and

directing said supersonic molecular beam onto a portion of said substrate.

15. The method recited in claim 14, further comprising the steps of:

introducing a seeding gas into said chamber; and

expanding molecules of said seeding gas with said clusters of etchant molecules.

16. The method recited in claim 15 wherein said etchant molecules are selected from the group consisting of HF and NH₄ F.

21. A method according to claim 14, wherein a reaction is formed by an interaction between said etchant molecules devoid of external activation, a product of said reaction being reactive with said substrate.