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Apparatus and a method for dynamically tuning a particle sensor in response to varying process conditions

  • US 5,424,558 A
  • Filed: 05/17/1993
  • Issued: 06/13/1995
  • Est. Priority Date: 05/17/1993
  • Status: Expired due to Fees
First Claim
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1. A particle sensor whose performance is capable of being dynamically tuned, comprising:

  • a particle sensor which provides output signals indicating the detection of particles in a manufacturing process; and

    a controller coupled to said particle sensor for processing said output signals of said particle sensor, said controller comprising;

    (a) a signal amplifier, said signal amplifier having adjustable bandwidth and gain;

    (b) means for receiving input signals representing information of said manufacturing process and the states of said manufacturing process; and

    (c) means responsive to said input signals for adjusting said bandwidth and said gain of said signal amplifier.

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