Apparatus and a method for dynamically tuning a particle sensor in response to varying process conditions
First Claim
1. A particle sensor whose performance is capable of being dynamically tuned, comprising:
- a particle sensor which provides output signals indicating the detection of particles in a manufacturing process; and
a controller coupled to said particle sensor for processing said output signals of said particle sensor, said controller comprising;
(a) a signal amplifier, said signal amplifier having adjustable bandwidth and gain;
(b) means for receiving input signals representing information of said manufacturing process and the states of said manufacturing process; and
(c) means responsive to said input signals for adjusting said bandwidth and said gain of said signal amplifier.
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Accused Products
Abstract
A method and an apparatus allow dynamic tuning of a particle sensor. The particle sensor provides output signals indicating particle detection to a controller, which includes an amplifier whose bandwidth and gain can be adjusted. The bandwidth and the gain of the amplifier are adjusted in accordance with predetermined optimal performance levels under the varying process conditions in which the particle sensor is placed. The optimal signal-to-noise ratio is maintained by adjusting the bandwidth and the gain according to both expected particle velocities and whether a plasma glow is present in the exhaust line for carrying gasses out of a process chamber.
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Citations
34 Claims
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1. A particle sensor whose performance is capable of being dynamically tuned, comprising:
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a particle sensor which provides output signals indicating the detection of particles in a manufacturing process; and a controller coupled to said particle sensor for processing said output signals of said particle sensor, said controller comprising; (a) a signal amplifier, said signal amplifier having adjustable bandwidth and gain; (b) means for receiving input signals representing information of said manufacturing process and the states of said manufacturing process; and (c) means responsive to said input signals for adjusting said bandwidth and said gain of said signal amplifier. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for dynamically tuning the performance of a particle sensor, comprising the steps of:
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installing a particle sensor which provides output signals indicating the detection of particles in a manufacturing process; and providing a controller coupled to said particle sensor for processing said output signals of said particle sensor, said step of providing a controller further comprising the steps of; (a) providing a signal amplifier, said signal amplifier having adjustable bandwidth and gain; (b) receiving input signals representing information of said manufacturing process and the states of said manufacturing process; and (c) adjusting, in response to said input signals, said bandwidth and said gain of said signal amplifier. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A particle sensor whose performance is capable of being dynamically tuned, comprising:
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a particle sensor which provides output signals indicating the detection of particles in a manufacturing process; and a controller coupled to said particle sensor for processing said output signals of said particle sensor, said controller comprising; (a) a signal amplifier, said signal amplifier having adjustable bandwidth or adjustable gain; (b) means for receiving input signals representing information of said manufacturing process and the states of said manufacturing process; and (c) means responsive to said input signals for adjusting said bandwidth or said gain of said signal amplifier. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
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25. A method for dynamically tuning the performance of a particle sensor, comprising the steps of:
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installing a particle sensor which provides output signals indicating the detection of particles in a manufacturing process; and providing a controller coupled to said particle sensor for processing said output signals of said particle sensor, said step of providing a controller further comprising the steps of; (a) providing a signal amplifier, said signal amplifier having adjustable bandwidth or adjustable gain; (b) receiving input signals representing information of said manufacturing process and the states of said manufacturing process; and (c) adjusting, in response to said input signals, said bandwidth or said gain of said signal amplifier. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32)
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33. A particle sensor whose performance is capable of being dynamically tuned, comprising:
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a particle sensor which provides output signals indicating the detection of particles in a manufacturing process; and a controller coupled to said particle sensor for processing said output signals of said particle sensor, said controller comprising; (a) a signal amplifier, said signal amplifier having adjustable bandwidth; (b) means for using said output signals of said particle sensor to determine the velocity of said particles and for producing signals representing said velocity; and (c) means responsive to said signals representing said velocity for adjusting said bandwidth of said signal amplifier.
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34. A method for dynamically tuning the performance of a particle sensor, comprising the steps of:
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installing a particle sensor which provides output signals indicating the detection of particles in a manufacturing process; and providing a controller coupled to said particle sensor for processing said output signals of said particle sensor, said step of providing a controller further comprising the steps of; (a) providing a signal amplifier, said signal amplifier having adjustable bandwidth; (b) using said output signals of said particle sensor to compute the velocity of said particles; and (c) adjusting, on the basis of said velocity computed in step (b), said bandwidth of said signal amplifier.
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Specification