Optically guided macroscopic-scan-range/nanometer resolution probing system

• US 5,426,302 A
• Filed: 04/28/1993
• Issued: 06/20/1995
• Est. Priority Date: 04/28/1993
• Status: Expired due to Term

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Marchman, Herschel, Wetsel, Grover C.
• Primary Examiner(s): Berman, Jack I.
• Assistant Examiner(s): Beyer, James
• Application Number:
  US08/054,457
• Time in Patent Office: 783 Days
• Field of Search: 250/306, 250/307, 359/368, 359/652, 359/654, 73/105
• US Class Current: 850/6
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: Y10S 977/868 with optical means

Abstract

A large-nanostructure probe with optically guided macroscopic scanning is disclosed for high-resolution imaging and characterization of nanostructures. The invention contemplates the use of a course positioning system, which comprises one or more quadratic index fiber optic lenses in conjunction with an optical microscope. A magnifying probe is placed in close proximity to a sample under inspection. The fiber optic lenses of the coarse positioning system are used to noninvasively carry the image of a sample-to-probe junction to the optical microscope. The optical microscope further magnifies the image, allowing for precise positioning of the probe tip to within 1 μm of a desired feature on the sample surface. For ease of viewing, the magnified image from the microscope may be displayed on a monitor using a charge coupled device ("CCD") camera, if so desired. Also disclosed is a long-range probing system wherein the probe tip may be one of a variety of measurement or probing apparatus. For example, a particularly effective configuration of the long-range probing system is one in which the optical viewing system of the present invention serves as part of a coarse approach system for a scanning tunneling microscope probe.

Claims

1. A long-range probing system for producing magnified images of a sample, comprising:

a high magnification probe having a tip adapted to be placed proximate to the sample so as to form a tip-to-sample junction;

a segmented piezoelectric concentric tube scanner coupled to said probe tip;

a least one translation stage coupled to said probe tip; and

an optical viewing system optically coupled to said tip-to-sample junction and physically separate from said high magnification probe, said optical viewing system comprising;

at least one quadratic index optical fiber rod lens having an object end and an image viewing end; and

an optical microscope having an object end and an image viewing end, said object end of said microscope being optically coupled to said image viewing end of said rod lens.

2. The optical system of claim 1, wherein said probe comprises a scanning-tunneling microscope.

3. The long-range microscope system of claim 1, wherein said translation stage comprises a manually adjusted differential micrometer driven stage.

4. The long-range microscope system of claim 1, further comprising:

a vibration damping structure for supporting the system, comprising;

a stacked base comprising a plurality of support plates;

vibration-absorbent material located between each support plate and a next adjacent support plate;

an optics table having a top surface and a plurality of pneumatic legs,

said top surface supported by said pneumatic legs;

a plurality of fluid-filled optics posts coupled to and extending upward from the top surface of said optics table; and

a plurality of flexible suspension cables each having a supporting end and a fastening end, each said fastening end coupled to an optics post and each said supporting end coupled to said stacked base for suspending said stacked base above said top surface of said optics table.

5. The long-range probing system according to claim 1, wherein said optical viewing system is coupled to at least one translation stage independent of said probe-tip translation stage.

6. Apparatus for viewing magnified images of the surface of a sample, comprising:

a high magnification probe having a probe tip adapted to be positioned proximate said surface so as to form a probe tip-to-sample junction;

an optical microscope positioned remote and physically separate from said high magnification probe; and

a quadratic index fiber optic lens coupled to said optical microscope and positioned to translate an image of the probe-to-surface sample junction to the optical microscope for magnification by the microscope.

7. The apparatus of claim 6, wherein said probe comprises a scanning tunneling microscope.

8. The apparatus of claim 6, wherein the lens comprises a self-focusing rod lens.

9. The apparatus of claim 8, wherein the self-focusing rod lens is a sectioned lens comprising a plurality of separate sections of the lens material in optical alignment.

10. A method of imaging a nanometer-scale feature on a sample, comprising:

providing an optical viewing system, said optical viewing system comprising;

at least one quadratic index optical fiber rod lens having an object end and an image viewing end; and

an optical microscope having an object end and an image viewing end, said object end of said microscope being optically coupled to said image viewing end of said rod lens;

providing a high magnification probe having a tip;

positioning said high magnification probe with respect to said sample to form a tip-to-sample junction;

positioning said optical viewing system to view said tip-to-sample junction such that said optical viewing system is optically coupled to said tip-to-sample junction and physically separate from said high magnification probe;

positioning the sample with respect to the probe tip

providing a fine positioner coupled to said probe tip;

fine positioning said probe tip; and

magnifying said sample using said high magnification probe.

11. The method of claim 10, wherein said high magnification probe is a scanning tunneling microscope.

12. The method of claim 10, wherein said fine positioner is a segmented piezoelectric tube.

13. The method of claim 10, wherein said sample positioning step comprises positioning said sample so that a feature desired to be magnified on said sample is within approximately 1 μ

m of said probe tip.