Optically guided macroscopic-scan-range/nanometer resolution probing system
First Claim
1. A long-range probing system for producing magnified images of a sample, comprising:
- a high magnification probe having a tip adapted to be placed proximate to the sample so as to form a tip-to-sample junction;
a segmented piezoelectric concentric tube scanner coupled to said probe tip;
a least one translation stage coupled to said probe tip; and
an optical viewing system optically coupled to said tip-to-sample junction and physically separate from said high magnification probe, said optical viewing system comprising;
at least one quadratic index optical fiber rod lens having an object end and an image viewing end; and
an optical microscope having an object end and an image viewing end, said object end of said microscope being optically coupled to said image viewing end of said rod lens.
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Accused Products
Abstract
A large-nanostructure probe with optically guided macroscopic scanning is disclosed for high-resolution imaging and characterization of nanostructures. The invention contemplates the use of a course positioning system, which comprises one or more quadratic index fiber optic lenses in conjunction with an optical microscope. A magnifying probe is placed in close proximity to a sample under inspection. The fiber optic lenses of the coarse positioning system are used to noninvasively carry the image of a sample-to-probe junction to the optical microscope. The optical microscope further magnifies the image, allowing for precise positioning of the probe tip to within 1 μm of a desired feature on the sample surface. For ease of viewing, the magnified image from the microscope may be displayed on a monitor using a charge coupled device ("CCD") camera, if so desired. Also disclosed is a long-range probing system wherein the probe tip may be one of a variety of measurement or probing apparatus. For example, a particularly effective configuration of the long-range probing system is one in which the optical viewing system of the present invention serves as part of a coarse approach system for a scanning tunneling microscope probe.
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Citations
13 Claims
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1. A long-range probing system for producing magnified images of a sample, comprising:
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a high magnification probe having a tip adapted to be placed proximate to the sample so as to form a tip-to-sample junction; a segmented piezoelectric concentric tube scanner coupled to said probe tip; a least one translation stage coupled to said probe tip; and an optical viewing system optically coupled to said tip-to-sample junction and physically separate from said high magnification probe, said optical viewing system comprising; at least one quadratic index optical fiber rod lens having an object end and an image viewing end; and an optical microscope having an object end and an image viewing end, said object end of said microscope being optically coupled to said image viewing end of said rod lens. - View Dependent Claims (2, 3, 4, 5)
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6. Apparatus for viewing magnified images of the surface of a sample, comprising:
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a high magnification probe having a probe tip adapted to be positioned proximate said surface so as to form a probe tip-to-sample junction; an optical microscope positioned remote and physically separate from said high magnification probe; and a quadratic index fiber optic lens coupled to said optical microscope and positioned to translate an image of the probe-to-surface sample junction to the optical microscope for magnification by the microscope. - View Dependent Claims (7, 8, 9)
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10. A method of imaging a nanometer-scale feature on a sample, comprising:
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providing an optical viewing system, said optical viewing system comprising; at least one quadratic index optical fiber rod lens having an object end and an image viewing end; and an optical microscope having an object end and an image viewing end, said object end of said microscope being optically coupled to said image viewing end of said rod lens; providing a high magnification probe having a tip; positioning said high magnification probe with respect to said sample to form a tip-to-sample junction; positioning said optical viewing system to view said tip-to-sample junction such that said optical viewing system is optically coupled to said tip-to-sample junction and physically separate from said high magnification probe; positioning the sample with respect to the probe tip providing a fine positioner coupled to said probe tip; fine positioning said probe tip; and magnifying said sample using said high magnification probe. - View Dependent Claims (11, 12, 13)
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Specification