Thin film DC plasma processing system

• US 5,427,669 A
• Filed: 12/30/1992
• Issued: 06/27/1995
• Est. Priority Date: 12/30/1992
• Status: Expired due to Term

• Current Assignee: Advanced Energy Industries Incorporated
• Original Assignee: Advanced Energy Industries Incorporated
• Inventors: Drummond, Geoffrey N.
• Primary Examiner(s): NGUYEN, NAM X
• Application Number:
  US07/998,513
• Time in Patent Office: 909 Days
• Field of Search: 204/192.12, 204/192.14, 204/192.13, 204/192.15, 204/298.03, 204/298.08, 204/298.32, 204/298.34
• US Class Current: 204/298.08
• CPC Class Codes: H01J 2237/0044 of objects being observed or treated
• CPC Class Codes: H01J 2237/0206 Extinguishing, preventing or controlling unwanted discharges
• CPC Class Codes: H01J 37/34 operating with cathodic sputtering H01J37/36 takes precedence ; methods of cathodic sputtering C23C14/34

Abstract

An enhanced DC plasma processing system which acts to immediately stop current from flowing through the plasma allows a variety of alternative embodiments for varying applications. In one embodiment, a tapped inductor is switched to ground to achieve substantial voltage reversal of about 10% upon detection of an arc condition through voltage and/or rate of voltage change techniques. This reversal of voltage is maintained long enough to allow restoration of uniform charge density within the plasma prior to restoration of the initial driving condition. A technique for preventing arc discharges involving periodically applying a reverse voltage is effected through a timer system in the power supply.

Claims

1. An enhanced DC plasma processing system comprising:

a. a coating chamber;

b. a material target disposed to expose coating material within said chamber;

c. a means for causing deposition of said coating material upon a substrate wherein said means for causing deposition comprises an anode and a cathode;

d. a DC power source wherein said DC power source has a direct current power output and first and second leads which are connected across a plasma load to establish a circuit;

e. an inductor means connected in series along said first lead between said direct current power output and said plasma load and having first and second inductor portions wherein said first and second portions are magnetically coupled; and

f. a switch connected from said second lead to said first lead at a point in between said first and second inductor portions.

2. An enhanced DC plasma processing system as described in claim 1 wherein said first inductor portion is connected between said switch and said direct current power output and wherein said first inductor portion is large.

3. An enhanced DC plasma processing system as described in claim 2 wherein said first inductor portion and said second inductor portion define a turns ratio with respect to each other and wherein the turns ratio of said second inductor portion to said first inductor portion is at least 10%.

4. An enhanced DC plasma processing system as described in claim 1 wherein said first inductor portion and said second inductor portion define a turns ratio with respect to each other and wherein the turns ratio of said second inductor portion to said first inductor portion is at least 10%.

5. An enhanced DC plasma processing system as described in claim 1, 3, or 4 and further comprising:

a. a means for sensing the occurrence of an arc condition within said plasma load; and

b. a means for activating said switch wherein said means for activating said switch is responsive to said means for sensing the occurrence of an arc condition within said plasma load.

6. An enhanced DC plasma processing system as described in claim 5 wherein said DC power source causes an output voltage into said plasma load and wherein said means for sensing the occurrence of an arc condition detects an output voltage into said plasma load.

7. An enhanced DC plasma processing system as described in claim 5 wherein said DC power source causes an output voltage which has normal operating variations into said plasma load and wherein said means for sensing the occurrence of an arc condition detects a high rate of change in the output voltage into said plasma load compared to the normal operating variations in said output voltage.

8. An enhanced DC plasma processing system as described in claim 7 wherein said means for sensing the occurrence of an arc condition also detects an output voltage into said plasma load.