Composite oxide thin film

• US 5,427,678 A
• Filed: 01/07/1994
• Issued: 06/27/1995
• Est. Priority Date: 07/10/1989
• Status: Expired due to Term

• Current Assignee: Research Development Corporation Of Japan (Japan Science And Technology Agency)
• Original Assignee: Research Development Corporation Of Japan (Japan Science And Technology Agency)
• Inventors: Yoshimura, Masahiro, Eul, Yoo S., Ishizawa, Nobuo
• Primary Examiner(s): Gorgos, Kathryn
• Assistant Examiner(s): Mayekar, Kishor
• Application Number:
  US08/178,619
• Time in Patent Office: 536 Days
• Field of Search: 205/322, 205/326, 205/333
• US Class Current: 205/322
• CPC Class Codes: C25D 11/02 Anodisation

Abstract

The present invention provides a composite oxide thin film which is characterized in that said thin film is formed, by energizing a work electrode and an opposite electrode immersed in a solution containing reactive components, through the reaction between said reactive components in the solution and said work electrode. More particularly, the present invention provides a composite oxide thin film formed through an electric-chemical reaction under water thermal conditions. According to the present invention, improvement of crystallinity is promoted by the use of water thermal conditions as compared with the conventional thin film forming methods, and it is possible to obtain a uniform composite oxide thin film having an excellent crystallinity directly at a relatively low temperature. A large-area thin film can thus easily be manufactured.

Claims

1. A method of manufacturing a composite oxide thin film, comprising

(i) providing a work electrode and an opposite electrode immersed in an electrolytic solution, said work electrode comprising a first metal, and said electrolytic solution comprising at least one reactive component which is reactive with said work electrode and contains ions of at least one metal other than the first metal in said work electrode;

(ii) energizing said work electrode at a solution temperature of at least 100°

C. and under a pressure of at least saturated vapor pressure of the solution, thereby reacting said reactive component with said work electrode and forming a composite oxide thin film which contains oxides of said first metal and said metal other than the first metal.

2. The method of claim 1, wherein said work electrode, said opposite electrode and said solution are contained within a pressure vessel.

3. The method of claim 1, wherein said work electrode comprises a metal selected from the group consisting of titanium, aluminum, niobium, zirconium, hafnium, lead, tantalum and iron.

4. The method of claim 3, wherein said work electrode comprises titanium and said opposite electrode comprises platinum.

5. The method of claim 1, wherein said reactive component is selected from the group consisting of barium hydroxide. strontium hydroxide, calcium hydroxide and lithium hydroxide.

6. The method of claim 5, wherein the pressure vessel further comprises means for heating said interior.

7. The method of claim 6, wherein the temperature of said solution in said pressure vessel is maintained within the range of from 100°

C. to 374.2°

C.

8. The method of claim 6, wherein direct current is applied to said electrodes in an amount effective to cause reaction of said work electrode and said reactive component.

9. The method of claim 6, wherein alternating current is applied to said electrodes in an amount effective to cause reaction of said work electrode and said reactive component.