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Interferential position measuring device

  • US 5,428,445 A
  • Filed: 05/18/1992
  • Issued: 06/27/1995
  • Est. Priority Date: 05/18/1991
  • Status: Expired due to Term
First Claim
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1. An interference device for generating signals, comprising:

  • a light source;

    at least two diffraction elements with identical or different diffraction structures; and

    detectors for detecting diffracted, mutually interfering fractional beams, wherein each of the diffraction structures of the diffraction elements has a scale period d=d(x) that varies continuously as a function of x, a direction of graduation of the diffraction element.

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