Counterbalanced vibratory triaxial angular rate sensor with open loop output
First Claim
1. Apparatus for measuring angular rotation about three axes comprising, in combination:
- a) at least one rotor, said at least one rotor comprising at least three rotor arms;
b) each of said at least three arms being radially directed from a common hub, each of said arms comprising, (i) substantially planar upper and lower members, each member comprising a central planar electrode with layers of oppositely-poled piezoelectric material fixed to opposed surfaces of said central electrode, (ii) a proofmass, and (iii) said upper and lower planar members being attached to said hub at one end and to said proofmass at the opposed end;
c) matching electrode structures, arranged to collect surface charge responsive to rotation about at least one of said axes, said structures being fixed to opposed surfaces of each planar member;
d) a case adapted to receive said at least one rotor;
e) means for attaching said at least one rotor to said case so that said attachment is torsionally compliant; and
f) means for rotationally oscillating said rotor about a predetermined body axis.
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Accused Products
Abstract
A sensor for measuring angular rotation rates about three orthogonal axes is based upon sensing Coriolis acceleration forces with a pair of nearly-identical rotors coupled coaxialy by a torsion spring and counter-oscillating in rotation. The torsional oscillator is mounted within a case by means of radial vanes, each comprisig two piezoelectric ceramic plates bonded to a thin metal core responsive to drive signals and providing rotational vibration isolation. The arms of the rotors are designed as piezoelectric open loop accelerometers. Electrodes of selected configurations are mounted to the outer surfaces of the planar members to collect charge indicative of Coriolis accelerations proportional to the angular rotations about the orthogonal axes.
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Citations
12 Claims
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1. Apparatus for measuring angular rotation about three axes comprising, in combination:
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a) at least one rotor, said at least one rotor comprising at least three rotor arms; b) each of said at least three arms being radially directed from a common hub, each of said arms comprising, (i) substantially planar upper and lower members, each member comprising a central planar electrode with layers of oppositely-poled piezoelectric material fixed to opposed surfaces of said central electrode, (ii) a proofmass, and (iii) said upper and lower planar members being attached to said hub at one end and to said proofmass at the opposed end; c) matching electrode structures, arranged to collect surface charge responsive to rotation about at least one of said axes, said structures being fixed to opposed surfaces of each planar member; d) a case adapted to receive said at least one rotor; e) means for attaching said at least one rotor to said case so that said attachment is torsionally compliant; and f) means for rotationally oscillating said rotor about a predetermined body axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification