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Counterbalanced vibratory triaxial angular rate sensor with open loop output

  • US 5,428,995 A
  • Filed: 03/08/1993
  • Issued: 07/04/1995
  • Est. Priority Date: 03/08/1993
  • Status: Expired due to Term
First Claim
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1. Apparatus for measuring angular rotation about three axes comprising, in combination:

  • a) at least one rotor, said at least one rotor comprising at least three rotor arms;

    b) each of said at least three arms being radially directed from a common hub, each of said arms comprising, (i) substantially planar upper and lower members, each member comprising a central planar electrode with layers of oppositely-poled piezoelectric material fixed to opposed surfaces of said central electrode, (ii) a proofmass, and (iii) said upper and lower planar members being attached to said hub at one end and to said proofmass at the opposed end;

    c) matching electrode structures, arranged to collect surface charge responsive to rotation about at least one of said axes, said structures being fixed to opposed surfaces of each planar member;

    d) a case adapted to receive said at least one rotor;

    e) means for attaching said at least one rotor to said case so that said attachment is torsionally compliant; and

    f) means for rotationally oscillating said rotor about a predetermined body axis.

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