Hinge assembly for integrated accelerometer
First Claim
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1. An integrated accelerometer comprising, in combination:
- a) a planar support base of metal-coated ceramic composition having an internal aperture;
b) a pendulous mass of metal-coated ceramic composition including a pair of strut legs;
c) a pair of hinges for flexibly engaging the free ends of said strut legs to said support base; and
d) each of said hinges being of single crystal silicon composition and including metallic pads for bonding to said base and to said pendulous mass.
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Abstract
An integrated accelerometer includes hinges of silicon composition for securing the strut legs of a pendulous mass to the accelerometer body. Both the body of the accelerometer and the pendulous mass are of metal-coated compositions. Metallized pads are provided on selected surfaces of the hinges for forming eutectic bonds with the body and struts of the pendulous mass of the accelerometer. A heavily-doped continuous region adjacent the surface of the hinge connects the eutectic bonds through a flexure region of reduced thickness to complete necessary device circuitry.
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Citations
14 Claims
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1. An integrated accelerometer comprising, in combination:
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a) a planar support base of metal-coated ceramic composition having an internal aperture; b) a pendulous mass of metal-coated ceramic composition including a pair of strut legs; c) a pair of hinges for flexibly engaging the free ends of said strut legs to said support base; and d) each of said hinges being of single crystal silicon composition and including metallic pads for bonding to said base and to said pendulous mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification