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Light-induced voltage alteration for integrated circuit analysis

  • US 5,430,305 A
  • Filed: 04/08/1994
  • Issued: 07/04/1995
  • Est. Priority Date: 04/08/1994
  • Status: Expired due to Term
First Claim
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1. An apparatus for analyzing an integrated circuit formed from a semiconductor, the apparatus comprising:

  • (a) a stage for holding the integrated circuit and making a plurality of electrical connections thereto;

    (b) at least one source of light having a photon energy near or above an energy bandgap of the semiconductor;

    (c) a means for focusing the source of incident light to illuminate a portion of a surface of the integrated circuit, the incident light producing a photogenerated electrical current in the integrated circuit;

    (d) means for scanning the focused source of incident light over the surface of the integrated circuit, the scanning means further comprising a position signal;

    (e) a constant-current electrical source connected to the stage to supply power to the integrated circuit, the constant-current source further comprising a signal voltage that changes in response to the photogenerated electrical current in the integrated circuit produced by the focused source of incident light, whereby the integrated circuit is analyzed.

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