Light-induced voltage alteration for integrated circuit analysis

• US 5,430,305 A
• Filed: 04/08/1994
• Issued: 07/04/1995
• Est. Priority Date: 04/08/1994
• Status: Expired due to Term

• Current Assignee: Sandia Corporation (Martin Marietta Corporation)
• Original Assignee: United States Department of Energy (Government of the United States of America)
• Inventors: Cole, Edward I. Jr., Soden, Jerry M.
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): Steady, Jacqueline M.
• Application Number:
  US08/225,021
• Time in Patent Office: 452 Days
• Field of Search: 250/562, 250/563, 250/572, 250/234, 250/235, 324/158 D
• US Class Current: 250/559.07
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence

Abstract

An apparatus and method are described for analyzing an integrated circuit (IC), The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC, The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs.

Claims

1. An apparatus for analyzing an integrated circuit formed from a semiconductor, the apparatus comprising:

(a) a stage for holding the integrated circuit and making a plurality of electrical connections thereto;

(b) at least one source of light having a photon energy near or above an energy bandgap of the semiconductor;

(c) a means for focusing the source of incident light to illuminate a portion of a surface of the integrated circuit, the incident light producing a photogenerated electrical current in the integrated circuit;

(d) means for scanning the focused source of incident light over the surface of the integrated circuit, the scanning means further comprising a position signal;

(e) a constant-current electrical source connected to the stage to supply power to the integrated circuit, the constant-current source further comprising a signal voltage that changes in response to the photogenerated electrical current in the integrated circuit produced by the focused source of incident light, whereby the integrated circuit is analyzed.

2. The apparatus in claim 1 further comprising a photodetector for forming a reflected light image of the integrated circuit.

3. The apparatus in claim 2 further comprising a display means for forming a composite image of the integrated circuit, the display means comprising a plurality of electrical inputs, the electrical inputs further comprising the signal voltage, the position signal, and a reflected light signal from the photodetector.

4. The apparatus in claim 1 further comprising a microscope.

5. The apparatus in claim 1 further comprising a switch matrix for controlling the electrical connections to the integrated circuit.

6. The apparatus in claim 5 in which the switch matrix is computer controlled.

7. The apparatus in claim 1 in which the source of light is a laser.

8. The apparatus in claim 7 in which the laser is chosen from the group consisting of heliumneon lasers, solid-state lasers, titanium sapphire lasers, dye lasers, and semiconductor lasers.

9. The apparatus in claim 8 in which the solid-state laser is a neodymium-doped yttrium aluminum garnet laser.

10. The apparatus in claim 1 further comprising a voltage amplifier for amplifying the signal voltage.

11. The apparatus in claim 10 in which the voltage amplifier is an ac-coupled voltage amplifier.

12. The apparatus in claim 1 in which the illuminated surface of the integrated circuit is a device surface.

13. The apparatus in claim 1 in which the illuminated surface of the integrated circuit is a substrate surface.

14. A method for analyzing an integrated circuit formed from a semiconductor, comprising the steps of:

(a) placing at least one integrated circuit on a stage, the stage making a plurality of electrical connections to the integrated circuit;

(b) irradiating a portion of a surface of the integrated circuit with a focused source of incident light, the source of incident light having a photon energy near or above an energy bandgap of the semiconductor.

(c) scanning the focused source of incident light over the surface of the integrated circuit with a scanning means, the scanning means providing a position signal;

(d) supplying power to the integrated circuit with a constant-current electrical source connected to the stage, the constant-current source providing a signal voltage that changes in response to the photogenerated electrical current in the integrated circuit produced by the focused source of incident light, whereby the integrated circuit is analyzed.

15. The method in claim 14 further comprising generating an analysis image of the integrated circuit with a display means, the image representing a plurality of electrical inputs, the electrical inputs further comprising the signal voltage and the position signal.

16. The method in claim 15 further comprising generating a composite image of the integrated circuit with a display means, the composite image comprising the analysis image and a reflected light image of the integrated circuit generated from a photodetector electrical input to the display means.

17. The method in claim 14 further comprising controlling the electrical connections to the integrated circuit with a switch matrix.

18. The method in claim 17 in which the switch matrix is computer controlled.

19. The method in claim 14 in which the source of light is a laser.

20. The method in claim 19 in which the laser is chosen from the group consisting of helium-neon lasers, solid-state lasers, titanium sapphire lasers, dye lasers, and semiconductor lasers.

21. The method in claim 20 in which the solid-state laser is a neodymium-doped yttrium aluminum garnet laser.

22. The method in claim 14 further comprising amplifying the signal voltage with a voltage amplifier.

23. The method in claim 22 in which the voltage amplifier is computer controlled.

24. The method in claim 14 in which the illuminated surface of the integrated circuit is a device surface.

25. The method in claim 14 in which the illuminated surface of the integrated circuit is a substrate surface.