Multiple split-beam laser processing apparatus generating an array of focused beams

• US 5,430,816 A
• Filed: 10/26/1993
• Issued: 07/04/1995
• Est. Priority Date: 10/27/1992
• Status: Expired due to Term

• Current Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Inventors: Ichihashi, Kouki, Oda, Gen, Furuya, Nobuaki
• Primary Examiner(s): Healy, Brian
• Application Number:
  US08/141,003
• Time in Patent Office: 616 Days
• Field of Search: 385/31, 385/33, 385/49, 385/115, 385/116, 385/147, 219/121.76, 219/121.77, 219/121.6, 219/121.61, 219/121.75, 372/101, 359/618, 359/619, 359/626, 359/620
• US Class Current: 385/33
• CPC Class Codes: B23K 2103/42 Plastics B23K2103/16 takes precedence
• CPC Class Codes: B23K 2103/50 Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
• CPC Class Codes: B23K 26/067 Dividing the beam into multiple beams, e.g. multifocusing
• CPC Class Codes: B23K 26/0676 into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
• CPC Class Codes: B23K 26/382 by boring
• CPC Class Codes: G02B 5/005 Diaphragms for cameras G03B9/02
• CPC Class Codes: G02B 6/06 the relative position of the fibres being the same at both ends, e.g. for transporting images
• CPC Class Codes: G02B 6/2808 using a mixing element which evenly distributes an input signal over a number of outputs
• CPC Class Codes: G02B 6/4249 comprising arrays of active devices and fibres
• CPC Class Codes: G02B 6/4296 coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources

Abstract

A laser processing apparatus includes a plurality of optical fibers formed into a bundle which is shaped such as to efficiently divide a laser beam into a plurality of split beams and transmit the split beams to respective converging lenses to be focused to have a high energy density when incident on respective workpieces. The optical fibers are shaped such as to each have a sufficiently large value of minimum radius of curvature to ensure that a small angle of divergence is maintained for each of the beams emitted from the fibers, thereby ensuring that the converging lenses can be small and inexpensive.

Claims

1. A laser processing apparatus comprising:

a laser oscillator;

a laser beam splitting and transmitting unit formed of a plurality of optical fibers arranged in a bundle, for splitting a laser beam emitted by said laser oscillator into a plurality of split laser beams and transmitting said split laser beams along respective ones of said optical fibers to respective emission ends of said optical fibers said optical fibers having respective incidence ends thereof disposed mutually closely together, positioned to receive said laser beam, and having said respective emission ends thereof spaced apart at regular intervals;

a split laser beam condensing optical system including a plurality of converging lenses each positioned in relation to a corresponding one of said emission ends, for focusing said split laser beams to produce respective condensed split laser beams;

workpiece support means for supporting a plurality of workpieces in relation to said split laser beam condensing optical system at respective positions for processing all of said workpieces simultaneously by respective ones of said condensed split laser beams;

an original laser beam condensing optical system for condensing an original laser beam emitted by said laser oscillator, to form a condensed laser beam having a value of angle of divergence which is substantially unchanged from an angle of divergence of said original laser beam; and

a beam scrambler formed of a transparent body having an elongated straight cylindrical shape, disposed between said original laser beam condensing optical system and said laser beam splitting and transmitting unit.

2. A laser processing apparatus according to claim 1, wherein said beam scrambler has a length which is at least 10 times a diameter thereof.

3. A laser processing apparatus according to claim 1, wherein a distance between said original laser beam condensing optical system and said beam scrambler is smaller than a diameter of said beam scramber.

4. A laser processing apparatus according to claim 1, wherein said angle of divergence of said condensed laser beam, transmitted from said original laser beam condensing optical system to be incident on said beam scrambler, is no greater than 0.1 radian.

5. A laser processing apparatus according to claim 1, wherein each of said optical fibers is formed with a straight portion extending from at least an emission end or an incidence end thereof, and wherein said straight portion has a length which is at least 50 times a core diameter of said each optical fiber.

6. A laser processing apparatus according to claim 1, wherein a value of angle of divergence of a light beam emitted from said laser beam splitting and transmitting unit is no greater than 0.1 radian.

7. A laser processing apparatus including a laser oscillator, a plurality of optical fibers arranged for splitting a laser beam emitted by said laser oscillator into a plurality of split laser beams and transmitting said split laser beams along respective ones of said optical fibers to respective emission ends of said optical fibers, a plurality of processing heads respectively connected to said emission ends and having mounted therein respective converging lenses each optically coupled to a corresponding one of said emission ends, and a workpiece table for supporting a plurality of workpieces and enabling arbitrary adjustment of relative positions between said workpieces and processing heads;

wherein each of said workpieces has a work surface thereof positioned slightly farther from a corresponding one of said converging lenses than a focal position of said corresponding converging lens.

8. A laser processing apparatus according to claim 7 wherein said processing heads comprise respective adjustment mechanisms for movably supporting said optical fibers at said emission ends thereof and for enabling individual position adjustment of each of said emission ends in relation to a corresponding one of said converging lenses.

10. A laser processing apparatus according to claim 7, wherein each of said processing heads fixedly retains an emission end of a corresponding one of said optical fibers in a stationary condition, and wherein each of said processing heads includes a movable portion having mounted therein a corresponding one of said converging lenses, and includes an adjustment mechanism operating on said moveable portion for position adjustment of said one of the converging lenses along a direction which is perpendicular to said common plane.

11. A laser processing apparatus according to claim 10, wherein said adjustment mechanism is rotatable for executing said position adjustment.

9. A laser processing apparatus including a laser oscillator, a plurality of optical fibers arranged for splitting a laser beam emitted by said laser oscillator into a plurality of split laser beams and transmitting said split laser beams along respective ones of said optical fibers to respective emission ends of said optical fibers, a plurality of processing heads respectively connected to said emission ends, said processing heads having mounted therein respective converging lenses each optically coupled to a corresponding one of said emission ends and each of said processing heads being formed with a nozzle portion having a tip formed with a nozzle aperture through which is emitted a condensed split laser beam produced from the corresponding one of said converging lenses, a workpiece table for supporting a plurality of workpieces respectively adjacent to said processing heads, and means for passing a flow of a gas through each of said processing heads to be ejected through said nozzle aperture thereof;

wherein each of said nozzle portions of said processing heads has formed externally thereon a peripherally surrounding nozzle cover, said nozzle cover having a peripheral annular surface which is substantially coplanar with an end of said tip.

12. A laser processing apparatus including a laser oscillator, a plurality of optical fibers arranged for splitting a laser beam emitted by said laser oscillator into a plurality of split laser beams and transmitting said split laser beams along respective ones of said optical fibers to respective emission ends of said optical fibers, a plurality of processing heads respectively connected to said emission ends and having mounted therein respective converging lenses each optically coupled to a corresponding one of said emission ends, and workpiece support means for supporting a plurality of workpieces adjacent to said processing heads;

wherein each of said converging lenses is mounted within a corresponding one of said processing heads at a position with respect to a corresponding one of said emission ends whereby a split laser beam emitted from said corresponding emission end has a diameter of divergence, at said position of said converging lens, which is substantially larger than an effective diameter of said converging lens.

13. A laser processing apparatus according to claim 12, wherein within each of said processing heads, a predetermined part of peripheral rays of a split laser beam emitted from a corresponding one of said emission ends are effectively shielded from reaching a corresponding one of said converging lenses.

14. A laser processing apparatus according to claim 13, wherein said peripheral rays are shielded by an internal surface of said each processing head.

15. A laser processing apparatus comprising:

a laser oscillator;

a first plurality of optical fibers, for splitting a laser beam emitted by said laser oscillator into a plurality of split laser beams and transmitting said split laser beams along respective ones of said optical fibers to respective emission ends said optical fibers, said optical fibers having respective incidence ends thereof positioned with said laser beam incident thereon, and having respective emission ends of said optical fibers spaced apart at regular intervals;

a second plurality of optical fibers having respective incidence ends thereof optically coupled to respective ones of said emission ends of the first plurality of optical fibers, for transmitting said split laser beams; and

receptacle means for enclosing and fixedly retaining said first plurality of optical fibers in a condition preventing mutual cross-overs among said first plurality of optical fibers, with said incidence ends of said first plurality of optical fibers respectively exposed at an incidence end of said receptacle means and said emission ends of said first plurality of optical fibers respectively exposed at an emission end of said receptacle means.

16. A laser processing apparatus according to claim 15, comprising a plurality of converging lenses disposed at respective emission ends of said second plurality of optical fibers, for condensing respective ones of said split laser beams.

17. A laser processing apparatus according to claim 15, wherein said receptacle means comprises a holder which is of substantially cylindrical hollow form, and a filler material occupying space within said holder surrounding said first plurality of optical fibers.

18. A laser processing apparatus according to claim 15, wherein said emission ends of said first plurality of optical fibers are arranged in a plane of said emission end of said receptacle means at positions which are different from and proportionally equivalent to respective positions of corresponding ones of said incidence ends of said first plurality of optical fibers in a plane of said incidence end of said receptacle means.

19. A laser processing apparatus according to claim 15, wherein respective portions of said first plurality of optical fibers extending from respective incidence ends thereof are bundled together with mutually adjacent ones of said portions in mutual contact.

20. A laser processing apparatus according to claim 19, wherein said first plurality of optical fibers diverge radially outward, from said incidence ends towards said emission ends thereof.

21. A laser processing apparatus according to claim 20, wherein all of said first plurality of optical fibers are straight in shape.

22. A laser processing apparatus according to claim 21, wherein said first plurality of optical fibers have respective outer sheath portions formed peripherally thereon, along a portion of each of said optical fibers extending from said emission end thereof, and wherein said outer sheath portions are disposed with mutually adjacent ones thereof in mutual contact at respective positions of transition between sheath-covered and bare portions of said first plurality of optical fibers.

23. A laser processing apparatus according to claim 20, wherein at least an axially centrally located one of said first plurality of optical fibers is straight in shape, and wherein each of remaining ones of said first plurality of optical fibers are at least partially curved in shape, to respectively diverge radially outward from said incidence ends to said emission ends thereof.

24. A laser processing apparatus according to claim 23, wherein said first plurality of optical fibers have respective outer sheath portions formed peripherally thereon, along a portion of each of said optical fibers extending from said emission end thereof, and wherein said outer sheath portions are disposed with mutually adjacent ones thereof in mutual contact at respective positions of transition between sheath-covered and bare portions of said first plurality of optical fibers.

25. A laser processing apparatus according to claim 23, wherein a portion of each of said first plurality of optical fibers, extending from said incidence end thereof, is straight in shape and aligned parallel to an optical axis of said laser beam emitted by said laser oscillator.

26. A laser processing apparatus according to claim 23, wherein a portion of each of said first plurality of optical fibers extending from said incidence end thereof and a portion extending from said incidence end thereof, are respectively straight in shape and aligned parallel to an optical axis of said laser beam emitted by said laser oscillator.

27. A laser processing apparatus according to claim 15, wherein each of said first plurality of optical fibers has a minimum radius of curvature which is at least 500 times a value of core diameter of each of said first plurality of optical fibers.