Centrifugal type, enclosed cleaning apparatus

• US 5,431,178 A
• Filed: 03/30/1994
• Issued: 07/11/1995
• Est. Priority Date: 03/30/1994
• Status: Expired due to Term

• Current Assignee: Hsien Hsin Chiu
• Original Assignee: Hsien Hsin Chiu
• Inventors: Chiu, Hsien hsin
• Primary Examiner(s): Coe, Philip R.
• Application Number:
  US08/221,027
• Time in Patent Office: 468 Days
• Field of Search: 134/95.2, 134/95.3, 134/102.2, 134/103.2, 134/104.4, 134/109, 134/135, 134/140, 134/153, 134/155, 134/158, 134/162, 134/902, 134/57 R, 134/58 R
• US Class Current: 134/57.00R
• CPC Class Codes: B08B 3/02 Cleaning by the force of jets or sprays
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H01L 21/67057 with the semiconductor substrates being dipped in baths or vessels
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

A centrifugal type, enclosed cleaning apparatus including a housing to hold the parts thereof, a washing container fastened in a hole on the housing, a lifting unit on the housing at the top, a stirrer unit having a base coupled to the lifting arm of the lifting unit and a material carrier with a shaft received inside the washing container and coupled to the transmission shaft of a power device and driven to turn within the washing container in causing a centrifugal effect, a cleaning unit consisted of a chemical pre-wash trough, a chemical trough, an inert air supply pipe assembly, an air compressing pipe assembly, a water trough, a water spray pipe assembly, and a separating trough, a drying unit, and a programmable control unit to control the operation of the lifting unit, the stirrer unit, the cleaning unit, and the drying unit in cleaning the products placed in the material carrier.

Claims

1. A cleaning apparatus comprising:

a housing having a through hole at a top;

a washing container having a top flange with a top opening, a rubber seal ring mounted on the top flange around the top opening and a bottom wall curved inwards, the bottom wall having a plurality of holes with respective operative valves;

a lifting unit on said housing, comprising an upright casing fixed to the top of said housing and a lifting arm movable by a transmission mechanism in a vertical direction along said upright casing;

a stirrer unit comprising a base connected to said lifting arm, a presser disk configured to be operatively pressed against the seal ring on said washing container to seal the top opening thereof, a material carrier having a shaft inserted in a mounting hole on the base, and a power drive having a transmission shaft;

a material carrier supporting product to be cleaned, the material carrier having a shaft coupled to the transmission shaft, said material carrier being driven by said power drive to turn the products to be cleaned in either direction within said washing container;

a cleaning unit comprising a chemical pre-wash trough, a chemical trough, a water trough, a separating trough, a water spray pipe assembly, and an air compressing pipe assembly, said chemical pre-wash trough, said chemical trough, and said water trough each having a respective pipe connected to an operative valve on said washing container for the circulation of the respective chemical solution or water between said washing container and respective trough, said chemical pre-wash trough and said chemical trough each having a bottom pipe connected to a water level regulating cylinder for controlling liquid level therein, said water trough having an overflow chamber with an overflow pipe for draining off overflowed liquid and guiding out suspension solution to said separating trough, said air compressing pipe assembly comprising pipes respectively controlled to guide compressed air into said chemical pre-wash trough, said chemical trough, and said water trough to force the solution or water therefrom into said washing container for washing the products held in said material carrier, and into said separating trough to force out the suspension solution, said separating trough having a drain pipe at the bottom for drawing away sediment, said water spray pipe assembly comprising a plurality of nozzles symmetrically mounted on said washing container and controlled to spray water into said washing container to wash the products held in said material carrier, the sprayed water being guided to said water trough for further circulation;

a drying unit comprising an air blower and an electric heater, controlled to produce a flow of hot air into said washing container for drying the products being cleaned and warming the water contained in said water trough; and

a control unit including a programmable control panel mounted on the top of said housing for controlling the operation of the apparatus,

whereby said control unit is controlled by a water level detector in said chemical pre-wash trough to let the chemical solution flow from said chemical trough to said washing container, and then to open the respective operative valves for permitting part of the chemical solution to flow to said chemical pre-wash trough during the return flow and the chemical solution to said chemical trough, and when the liquid level in said chemical pre-wash trough is automatically supplied with the chemical solution from the chemical container controlled by a control valve and a water level detector.

2. The cleaning apparatus of claim 1 further comprising:

a drying container in a through hole on said housing and linked with said washing container, said drying unit and said cleaning unit;

a rotary power device mounted on said lifting unit;

two supporting arms respectively connected to said rotary power device; and

two transmission mechanisms respectively mounted on said supporting arms and disposed in said washing container and said drying container.