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Layered electrodes with inorganic thin films and method for producing the same

  • US 5,431,800 A
  • Filed: 11/05/1993
  • Issued: 07/11/1995
  • Est. Priority Date: 11/05/1993
  • Status: Expired due to Fees
First Claim
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1. A method for making a layered electrode, said method comprising the steps of:

  • a) mounting a conductor in a cold wall reaction chamber;

    b) heating said conductor through an electrical connection to a power supply;

    c) contacting a precursor vapor and a blend gas with said conductor in the reaction chamber;

    d) depositing a thin continuous film layer of an inorganic material on said conductor by pyrolytic decomposition of the precursor vapor at a surface of said conductor; and

    e) preparing the conductor with the thin-film layer for use as an electrode, including connecting a lead to the conductor.

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