Detector for the detection of chemical species or photons using a field effect transistor
First Claim
1. Detector for the detection of a chemical species using an enrichment n-channel field effect transistor, said detector being connectable to an external circuit, said detector comprising:
- a field effect transistor (FET) having a semiconducting substrate in which are defined two zones forming a source and a drain of the transistor;
an electricity conducting material transistor gate separated from the substrate by an electrically insulating layer;
a gate electrical connection for connecting the gate of the transistor to the external circuit;
a drain electrical connection for connecting the drain of the transistor to the external circuit;
a source electrical connection for connecting the source of the transistor to the external circuit;
means external to the transistor connected between the transistor gate and the source for applying a potential difference VGS ;
means external to the transistor connected between the transistor drain and source for applying a potential difference VDS ;
a chemical species sensing film deposited between the transistor gate connection and the transistor drain connection, said film being in electrical contact solely between said gate and drain and being electrically sensitive to chemical species to be detected; and
means for measuring a variation of a current between the transistor drain and source, thereby detecting the presence of said chemical species.
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Abstract
The invention relates to a detector or sensor for the detection of chemical species or photons. This detector uses a field effect transistor having a semiconducting material substrate (1) in which are defined a source (3) and a drain (5), a gate (9) separated from the substrate by an insulating layer, an external energy source for polarizing the drain, source and gate of the transistor, a film (11), which is conductive or which can be rendered conductive and which is sensitive to the chemical species or photons to be detected, and an ammeter for measuring an electric current variation of the transistor. The arrangement of the film (11) between the connections of the gate (9) and the drain (5) makes it possible to modify the polarization voltage of the transistor gate under the effect of the species to be detected, which is represented by a variation of the current between the drain and the source, when the transistor is correctly polarized.
71 Citations
34 Claims
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1. Detector for the detection of a chemical species using an enrichment n-channel field effect transistor, said detector being connectable to an external circuit, said detector comprising:
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a field effect transistor (FET) having a semiconducting substrate in which are defined two zones forming a source and a drain of the transistor; an electricity conducting material transistor gate separated from the substrate by an electrically insulating layer; a gate electrical connection for connecting the gate of the transistor to the external circuit; a drain electrical connection for connecting the drain of the transistor to the external circuit; a source electrical connection for connecting the source of the transistor to the external circuit; means external to the transistor connected between the transistor gate and the source for applying a potential difference VGS ; means external to the transistor connected between the transistor drain and source for applying a potential difference VDS ; a chemical species sensing film deposited between the transistor gate connection and the transistor drain connection, said film being in electrical contact solely between said gate and drain and being electrically sensitive to chemical species to be detected; and means for measuring a variation of a current between the transistor drain and source, thereby detecting the presence of said chemical species. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. Detector for the detection of a chemical species using a depletion n-channel field effect transistor, said detector being connectable to an external circuit, said detector comprising:
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a field effect transistor (FET) having a semiconducting substrate in which are defined two zones forming a source and a drain of the transistor; an electricity conducting material transistor gate separated from the substrate by an electrically insulating layer; a gate electrical connection for connecting the gate of the transistor to the external circuit; a drain electrical connection for connecting the drain of the transistor to the external circuit; a source electrical connection for connecting the source of the transistor to the external circuit; means external to the transistor connected between the transistor gate and the source for applying a potential difference VGS ; means external to the transistor connected between the transistor drain and source for applying a potential difference VDS ; a chemical species sensing film deposited between the transistor gate connection and the transistor source connection, said film being in electrical contact solely between said gate and source and being electrically sensitive to chemical species to be detected; and means for measuring a variation of a current between the transistor drain and source, thereby detecting the presence of said chemical species. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. Detector for the detection of photons using an enrichment n-channel field effect transistor, said detector being connectable to an external circuit, said detector comprising:
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a field effect transistor (FET) having a semiconducting substrate in which are defined two zones forming a source and a drain of the transistor; an electricity conducting material transistor gate separated from the substrate by an electrically insulating layer; a gate electrical connection for connecting the gate of the transistor to the external circuit; a drain electrical connection for connecting the drain of the transistor to the external circuit; a source electrical connection for connecting the source of the transistor to the external circuit; means external to the transistor connected between the transistor gate and the source for applying a potential difference VGS ; means external to the transistor connected between the transistor drain and source for applying a potential difference VDS ; a photon sensing film deposited between the transistor gate connection and the transistor drain connection, said film being in electrical contact solely between said gate and drain and being electrically sensitive to photons to be detected; and means for measuring a variation of a current between the transistor drain and source, thereby detecting the presence of said photons. - View Dependent Claims (24, 25, 26, 27, 28)
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29. Detector for the detection of photons using a depletion n-channel field effect transistor, said detector being connectable to an external circuit, said detector comprising:
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a field effect transistor (FET) having a semiconducting substrate in which are defined two zones forming a source and a drain of the transistor; an electricity conducting material transistor gate separated from the substrate by an electrically insulating layer; a gate electrical connection for connecting the gate of the transistor to the external circuit; a drain electrical connection for connecting the drain of the transistor to the external circuit; a source electrical connection for connecting the source of the transistor to the external circuit; means external to the transistor connected between the transistor gate and the source for applying a potential difference VGS ; means external to the transistor connected between the transistor drain and source for applying a potential difference VDS ; a photon sensing film deposited between the transistor gate connection and the transistor source connection, said film being in electrical contact solely between said gate and source and being electrically sensitive to photons to be detected; and means for measuring a variation of a current between the transistor drain and source, thereby detecting the presence of said photons. - View Dependent Claims (30, 31, 32, 33, 34)
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Specification