Plasma process apparatus including ground electrode with protection film

• US 5,432,315 A
• Filed: 02/28/1994
• Issued: 07/11/1995
• Est. Priority Date: 05/31/1991
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Fujii, Takashi, Yoshigai, Motohiko, Kaji, Tetsunori, Kawasaki, Yoshinao, Nishiumi, Masaharu
• Primary Examiner(s): Paschall, Mark H.
• Application Number:
  US08/203,035
• Time in Patent Office: 498 Days
• Field of Search: 219/121.43, 219/121.44, 156/345, 156/643, 156/646, 204/298.17, 204/298.37, 204/298.38, 315/111.21, 315/111.51
• US Class Current: 219/121.43
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32559 Protection means, e.g. coatings
• CPC Class Codes: H01J 37/32706 Polarising the substrate
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

A microwave plasma processing apparatus includes a vacuum chamber which is evacuated to a predetermined pressure and into which processing gas is introduced, a sample table, disposed in the vacuum chamber, to which an AC voltage is applied, a microwave generating device for generating microwaves and introducing the microwaves towards a surface to be processed of a sample located on the sample table, a magnetic field generating device for generating a magnetic field in the vacuum chamber, an insulator disposed on a part of the vacuum chamber exposed to a plasma produced in the vacuum chamber by interaction of the processing gas, the microwaves, and the magnetic field, and a ground electrode disposed in the vacuum chamber at a place which is on a microwave introduction side of the vacuum chamber with respect to the surface of the sample table on which the sample is placed, a surface of the ground electrode being covered by a semiconducting thin film.

Claims

1. A microwave plasma processing apparatus comprising:

a vacuum chamber which is evacuated to a predetermined pressure and into which processing gas is introduced;

a sample table, disposed in the vacuum chamber, to which an AC voltage is applied;

microwave generating means for generating microwaves and introducing the microwaves towards a surface to be processed of a sample located on the sample table;

magnetic field generating means for generating a magnetic field in the vacuum chamber;

an insulator disposed on a part of the vacuum chamber exposed to a plasma produced in the vacuum chamber interaction of the processing gas, the microwaves, and the magnetic field; and

a ground electrode disposed in the vacuum chamber at a place which is on a microwave introduction side of the vacuum chamber with respect to the surface of the sample table on which the sample is placed, a surface of the ground electrode being covered by a semiconducting thin film.

2. A microwave plasma processing apparatus according to claim 1, wherein the semiconducting thin film is less than 1 mm thick.

3. A microwave plasma processing apparatus according to claim 1, wherein the processing gas is introduced into the microwave introduction side of the vacuum chamber such that the processing gas passes between an inner periphery of the vacuum chamber and the semiconducting thin film.

4. A microwave plasma processing apparatus according to claim 1, wherein the insulator is an electrical insulator.

9. A plasma processing apparatus according to claim 4, wherein the semiconducting layer is made of alumina.

10. A plasma processing apparatus according to claim 9, wherein the introducing means introduces the processing gas into the vacuum chamber such that the processing gas flows along a portion of the semiconducting layer.

5. A plasma processing apparatus comprising:

a vacuum chamber;

means for evacuating the vacuum chamber to a predetermined pressure;

means for introducing a processing gas into the vacuum chamber while the evacuating means maintains the vacuum chamber at the predetermined pressure;

means for generating a plasma in the vacuum chamber from the processing gas in the vacuum chamber;

a sample table disposed in the vacuum chamber for holding a sample to be subjected to plasma processing by the plasma;

a ground electrode disposed in the vacuum chamber apart from the sample table and having a surface facing the plasma;

means for establishing a bias voltage between a sample held on the sample table and the ground electrode such that ions in the plasma are attracted to the sample, thereby subjecting the sample to plasma processing by the plasma; and

means for preventing the surface of the ground electrode facing the plasma from being affected by the plasma;

wherein a portion of the vacuum chamber facing the plasma is made of a semiconducting material.

6. A plasma processing apparatus according to claim 5, wherein a portion of the vacuum chamber facing the plasma is made of metal and has a semiconducting layer disposed thereon for preventing the metal from being affected by the plasma.

7. A plasma processing apparatus according to claim 5, wherein the establishing means includes means for applying a voltage to the sample table, thereby applying the voltage to the sample held on the sample table and establishing a bias voltage between the sample held on the sample table and the ground electrode.

8. A plasma processing apparatus according to claim 5, wherein the preventing means includes a semiconducting layer having a thickness of less than 1 mm disposed on the surface of the ground electrode facing the plasma.

11. A plasma processing apparatus according to claim 5, wherein the ground electrode has a gas flow path formed therein, and wherein the introducing means introduces the processing gas into the vacuum chamber through the gas flow path in the ground electrode.

12. A plasma processing apparatus comprising:

a vacuum chamber having a metal wall;

means for evacuating the vacuum chamber to a predetermined pressure;

means for introducing a processing gas into the vacuum chamber while the evacuating means maintains the vacuum chamber at the predetermined pressure;

means for generating a plasma in the vacuum chamber from the processing gas in the vacuum chamber;

a sample table disposed in the vacuum chamber for holding a sample to be subjected to plasma processing by the plasma;

means for establishing a bias voltage between a sample held on the sample table and the metal wall such that ions in the plasma are attracted to the sample, thereby subjecting the sample to plasma processing by the plasma; and

means for preventing a surface of the metal wall facing the plasma from being affected by the plasma.

13. A plasma processing apparatus according to claim 12, wherein the surface of the metal wall facing the plasma is covered with a layer made of one of an insulating material and a semiconducting material, the layer having a thickness of less than 1 mm.

14. A plasma processing apparatus according to claim 12, wherein the metal wall is grounded.

15. A wafer treating apparatus for treating a wafer with a plasma, the wafer treating apparatus comprising:

a chamber defining a first region and having a wall member defining a second region, the wall member having an electrically conductive portion;

means for generating a plasma in the first region;

a wafer holder disposed in the second region for holding a wafer to be subjected to treatment by the plasma, the wafer holder having an electrically conductive portion;

a bias voltage source having a first electrode connected to the electrically conductive portion of the wafer holder and a second electrode connected to the electrically conductive portion of the wall member for applying a bias voltage to a wafer held by the wafer holder to subject the wafer to treatment by the plasma; and

a protective layer disposed on a surface of the electrically conductive portion of the wall member facing the wafer held by the wafer holder for preventing the wall member from being affected by the plasma.

16. A wafer treating apparatus according to claim 15, wherein the electrically conductive portion of the wall member is grounded.

17. A method of treating a wafer with a plasma, the method comprising the steps of:

generating a plasma;

disposing a wafer to be subjected to treatment by the plasma;

disposing an electrically conductive member facing the wafer;

grounding the electrically conductive member;

disposing a protective layer on a surface of the grounded electrically conductive member facing the wafer to prevent the grounded electrically conductive member from being affected by the plasma; and

establishing a bias voltage between the wafer and the grounded electrically conductive member to cause the plasma to be attracted to the wafer, thereby subjecting the wafer to treatment by the plasma.