Method and apparatus for inspecting patterned thin films using diffracted beam ellipsometry

• US 5,432,607 A
• Filed: 02/22/1993
• Issued: 07/11/1995
• Est. Priority Date: 02/22/1993
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Taubenblatt, Marc A.
• Primary Examiner(s): Limanek, Robert P.
• Assistant Examiner(s): WILLIAMS, ALEXANDER O
• Application Number:
  US08/021,004
• Time in Patent Office: 869 Days
• Field of Search: 356/364, 356/400, 356/401, 356/357, 356/369, 356/445, 356/301, 356/351, 356/354, 356/356, 356/237, 250/206.2, 250/206.1
• US Class Current: 356/364
• CPC Class Codes: G01N 21/211 Ellipsometry optical thickness measurement G01B11/06
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10

Abstract

A method and apparatus for inspecting a repeating pattern on an object using an optical inspection system to detect variations in the pattern. The object is illuminated with substantially monochromatic light. A diffracted beam is formed. The diffracted beam has a plurality of polarization components. At least one of the polarization components of the diffracted beam is blocked. Variations in the pattern are detected as light intensity variations in the polarization components that are not blocked.

Claims

1. In an optical system for inspecting an object, a method of inspecting a repeating pattern on the object, comprising the steps of:

(a) illuminating the object with substantially monochromatic light;

(b) forming a diffracted beam from the substantially monochromatic light, the diffracted beam comprising a plurality of diffracted beam components, each having a respective polarization state;

(c) blocking at least one of the diffracted beam components;

(d) detecting the diffracted beam components that are not blocked; and

(e) determining a polarization state of the diffracted beam based on the diffracted beam components that are not blocked.

2. A method in accordance with claim 1, wherein step (d) includes detecting at least one of variations in size in the repeating pattern and variations in shape in the repeating pattern.

3. A method in accordance with claim 1, wherein step (c) includes the step of adjusting at least one of an elliptical polarizer and an analyzing polarizer.

11. A method in accordance with claim 1, wherein a plurality of diffracted beams are produced from the substantially monochromatic light, further comprising the step of:

blocking at least one of the plurality of diffracted beams so that at most one of the diffracted beams is detected by the light detecting means.

4. In an optical system for inspecting an object, a method of inspecting a repeating pattern on the object, comprising the steps of:

(a) illuminating the object with substantially monochromatic light;

(b) forming a diffracted beam from the substantially monochromatic light, the diffracted beam comprising a plurality of diffracted beam components, each having a respective polarization state, the diffracted beam having an average polarization;

(c) blocking a diffracted beam component having a polarization state equal to the average polarization, to substantially null the diffracted beam; and

(d) detecting the diffracted beam components that are not blocked.

5. A method according to claim 4, further comprising:

(e) detecting at least one of variations in size in the repeating pattern and variations in shape in the repeating pattern.

6. A method in accordance with claim 5, further comprising the steps of:

changing the wavelength of the substantially monochromatic light;

repeating steps (a) through (d); and

detecting additional variations in the pattern that differ from the variations detected in step (e).

7. A method in accordance with claim 5, wherein the substantially monochromatic light has an angle of incidence relative to a direction that is normal to the object and an azimuthal angle in a plane of the object, the method further comprising the steps of:

changing at least one of the group consisting of the angle of incidence and the azimuthal angle;

repeating steps (a) through (d); and

detecting additional variations in the pattern that differ from the variations detected in step (e).

8. A method in accordance with claim 4, wherein step (b) includes the step of forming the diffracted beam normal to the object.

9. A method in accordance with claim 8, further comprising the step of:

forming an image of the pattern from the diffracted beam.

10. A method in accordance with claim 4, wherein step (b) includes the step of elliptically polarizing the substantially monochromatic light.

21. Apparatus according to claim 4, wherein step (d) includes detecting a first diffracted beam component that is parallel to the plane of incidence and a second diffracted beam component that is perpendicular to the plane of incidence.

12. In an optical system for inspecting an object, having a source of substantially monochromatic light, an elliptical polarizer positioned between the light source and the object, light detecting means, and an analyzing polarizer positioned between the object and the light detecting means;

a method of inspecting a repeating pattern on an object to detect variations in the pattern, comprising the steps of;

(a) illuminating the object with substantially monochromatic light from the light source, the monochromatic light including a first light component having a polarization state that is parallel to a plane of incidence of the monochromatic light and a second light component having a polarization state that is perpendicular to the plane of incidence;

(b) forming, from the substantially monochromatic light, a diffracted beam that is incident upon the light detecting means, the diffracted beam comprising a plurality of diffracted beam components, each diffracted beam component having a respective polarization state;

(c) adjusting at least one of the elliptical polarizer and the analyzing polarizer to block at least one of the diffracted beam components; and

(d) detecting variations in the pattern as light intensity variations in the diffracted beam components that are not blocked.

13. In an optical system for inspecting an object, a method of inspecting a repeating pattern on the object, comprising the steps of:

(a) illuminating the object with substantially monochromatic light including a first light component having a polarization state that is parallel to a plane of incidence of the substantially monochromatic light and a second light component having a polarization state that is perpendicular to the plane of incidence;

(b) forming a diffracted beam from the substantially monochromatic light, the diffracted beam comprising a plurality of diffracted beam components, each diffracted beam component having a respective polarization state;

(c) blocking at least one of the diffracted beam components;

(d) detecting the diffracted beam components that are not blocked; and

(e) determining a polarization state of the diffracted beam based on the diffracted beam components that are not blocked.

14. A method in accordance with claim 13, further comprising the step of monitoring the polarization state of the diffracted beam for determining when a process has reached an end point.

15. An optical system for inspecting an object, comprising:

means for illuminating the object with substantially monochromatic light including a first light component having a polarization state that is parallel to a plane of incidence of the substantially monochromatic light and a second light component having a polarization state that is perpendicular to the plane of incidence;

means for forming, from the substantially monochromatic light, a diffracted beam that emanates from the object, the diffracted beam comprising a plurality of diffracted beam components, each diffracted beam component having a respective polarization state, the diffracted beam having an average polarization;

means for blocking a diffracted beam component that is equal in polarization to the average polarization, thereby substantially nulling the diffracted beam; and

means for detecting the diffracted beam components that are not blocked.

16. An optical system as claimed in claim 15, wherein the blocking means include an analyzing polarizer, the analyzing polarizer having a transmitting axis that is substantially orthogonal to an average polarization of the diffracted beam, the analyzing polarizer being positioned between the object and the detecting means.

17. An optical system as claimed in claim 16, wherein the analyzing polarizer is a linear polarizer.

18. An optical system as claimed in claim 15, wherein the forming means include an elliptical polarizer.

19. An optical system as claimed in claim 15, further comprising:

means for moving the light source relative to the object to inspect a larger area.

20. An optical system as claimed in claim 15, wherein the light detecting means include one of the group consisting of a photodetector, a camera and a videocamera.

22. A method according to claim 15, further comprising means for determining a polarization state of the diffracted beam based on the diffracted beam components that are not blocked.

23. In an optical system for inspecting an object, a method of inspecting a repeating pattern on the object, comprising the steps of:

(a) illuminating the object with substantially monochromatic light;

(b) forming a diffracted beam from the substantially monochromatic light, the diffracted beam comprising a plurality of diffracted beam components, each having a respective polarization state, the diffracted beam having an average polarization;

(c) blocking at least one of the diffracted beam components;

(d) detecting the diffracted beam components that are not blocked;

(e) forming an additional diffracted beam having an additional average polarization and a plurality of additional diffracted beam components, the additional average polarization being different from the average polarization of the diffracted beam formed in step (b);

(f) blocking one of the additional diffracted beam components;

(g) detecting light intensity variations in the additional diffracted beam; and

(h) subtracting the light detected during step (g) from the light detected during step (d), thereby to detect variations in the repeating pattern.