Bar code recipe selection system using workstation controllers

• US 5,432,702 A
• Filed: 06/17/1994
• Issued: 07/11/1995
• Est. Priority Date: 06/17/1994
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Barnett, Gerald W.
• Primary Examiner(s): RUGGIERO, JOSEPH F
• Application Number:
  US08/259,971
• Time in Patent Office: 389 Days
• Field of Search: 364/468, 364/478, 364/474.11, 364/131-135, 364/401-403, 235/375, 235/376, 235/383, 235/385
• US Class Current: 700/116
• CPC Class Codes: G05B 19/4183 characterised by data acquisition, e.g. workpiece identification
• CPC Class Codes: G05B 2219/32046 On detection workpiece code load program for workpiece from central
• CPC Class Codes: G05B 2219/36371 Barcode reader
• CPC Class Codes: G05B 2219/45026 Circuit board, pcb
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A barcode processing system for a semiconductor wafer, comprising a workstation controller, a bar code reader attached to the workstation controller for reading a bar code assigned to the wafer, a tool assigned to the workstation controller for processing the wafer, and a host computer assigned to the tool and the workstation controller for determining the appropriate process to be performed on the wafer.

The bar code read by the bar code reader is sent to the workstation controller, and the workstation controller requests processing information from the host computer, wherein that request includes information obtained from the bar code read by the bar code reader and sent to the workstation controller. The host computer determines an appropriate process step, or recipe, to be applied to the wafer based upon the information received from the processing information request from the workstation controller, and sends this information to the workstation controller.

The workstation controller determines an appropriate process associated with this process step. Once the workstation controller has the appropriate process to be applied to the wafer, the workstation controller determines if that process can be performed by the tool associated with the workstation controller. If the process can be performed by the tool, the recipe is sent to the tool so that the tool has the information it needs to process the wafer.

Claims

1. A method for performing a process on a semiconductor wafer contained in a lot, comprising the steps of:

scanning a bar code associated with said wafer using a bar code reader connected to a workstation controller, said bar code including lot information identifying said wafer;

providing said lot information to said workstation controller;

sending a request from said workstation controller to a host computer for a current process step to be performed on said wafer, said request including said lot information;

determining in said host computer said current process step according to said lot information;

sending information from said host computer to said workstation controller indicating said current process step;

sending process information from said workstation controller to a tool indicating a recipe to perform said current process step; and

performing said recipe on said wafer by said tool.

2. A method as claimed in claim 1, further comprising the step of:

reading in said workstation controller a status message sent from said tool, wherein said status message includes status of said tool.

3. A method as claimed in claim 1, further comprising the step of:

in said workstation controller determining if said tool is capable of performing said process on said wafer, and if said tool is not capable of performing said process.

4. A method as claimed in claim 1, further comprising the steps of:

sending status information from said tool to a monitor directly connected to said tool, and displaying said status information by said monitor, wherein said status information includes status of said wafer, said tool, and said process.

5. A method as claimed in claim 1, further comprising the steps of:

sending an abort message from said workstation controller to said tool to not perform said process if said workstation controller determines that said tool cannot perform said process on said wafer;

sending said abort message from said tool to said monitor; and

displaying said abort message by said monitor.

6. A method as claimed in claim 1, wherein:

said information indicating said current process step sent by said host computer to said workstation controller is a process step identification, wherein said process step identification is sent by said workstation controller to said tool, and wherein said process step identification is used by said tool to determine said process associated with said process step identification, said process being stored in said tool, and wherein said tool performs said process on said wafer according to said process step identification.

7. An apparatus for performing a process on a semiconductor wafer, said apparatus comprising:

a bar code reader configured to read a bar code identifying said wafer and to output a signal indicating said bar code;

a workstation controller coupled to said bar code reader, said workstation controller receiving lot information contained in said bar code identifying said wafer and outputting a request for a process step to apply said wafer, said request including said lot information;

a host computer communicatively connected to said workstation controller and receiving said request from said workstation controller, said host computer having means for determining an appropriate process step to apply to said wafer according to said lot information and for sending process information indicating said appropriate process step to said workstation controller,

process determination means in said workstation controller for determining an appropriate process to perform on said wafer, said workstation controller providing process information identifying said appropriate process; and

a tool communicatively connected to said workstation controller and receiving said process information, said tool applying said appropriate process to said wafer placed in said tool in accordance with said process information.

8. The apparatus as claimed in claim 7, further comprising:

a monitor communicatively connected to said tool; and

sending means in said workstation controller for sending an error message to said tool for display on said monitor, said error message being sent by said workstation controller if said workstation controller determines that said tool is not able to perform said process on said wafer.

9. The apparatus as claimed in claim 8, further comprising:

a keyboard connected to said tool, said keyboard receiving input from an operator indicating a message, and wherein said message is sent to said workstation controller.

10. An apparatus as claimed in claim 7, further comprising:

a monitor directly connected to said tool for displaying status information sent to said monitor by said tool, wherein said status information includes status of said wafer, said tool, and said process.

11. An apparatus for performing a process on one or more wafers, said apparatus comprising:

a first and second bar code reader for reading a bar code identifying a semiconductor wafer and respectively providing first and second lot information indicative thereof;

a first workstation controller communicatively connected to said first bar code reader to receive said first lot information;

a second workstation controller communicatively connected to said second bar code reader to receive said second lot information;

a first and second tool communicatively connected to said first and second workstation controller, respectively;

a host computer communicatively connected to said first workstation controller and said second workstation controller, said host computer receiving first and second requests from said first and second workstation controller, respectively, and sending first step information to said first workstation controller, in response to said first request, corresponding to a first tool process step to be applied by said first tool, and for sending second step information to said second workstation controller, in response to said second request, corresponding to a second tool process step to be applied by said second tool;

process determination means in said first and second workstation controllers for determining a first tool process and a second tool process for said first and second tool, respectively, according to said first tool process step and said second tool process step, and means for providing said first and second tool processes to said first and second tools, respectively,

wherein said first tool responds to said first provided tool process from said first workstation controller to perform said first tool process on a wafer placed in said first tool, and said second tool responds to said second provided tool process from said second workstation controller to perform said second tool process on a wafer placed in said second tool.

12. An apparatus as claimed in claim 11, further comprising:

a first monitor connected to said first tool for displaying first status information sent by said first tool, wherein said first status information includes status of said first wafer, said first tool, and said first tool process applied to said wafer;

a second monitor connected to said second tool for displaying second status information sent by said second tool, wherein said second status information includes status of said second wafer, said second tool, and said second tool process applied to said wafer.