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Method of using corrosion prohibiters in aluminum alloy films

  • US 5,434,104 A
  • Filed: 03/02/1994
  • Issued: 07/18/1995
  • Est. Priority Date: 03/02/1994
  • Status: Expired due to Fees
First Claim
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1. A method of forming a metal film that is resistant to corrosion in an acidic environment on the surface of a semiconductor device comprising the steps of (a) depositing an alloy comprising aluminum and magnesium onto said surface wherein said magnesium constitutes about 0.1 to about 5 weight percent of said metal film based on the total weight of said metal film and (2) thereafter covering said metal film with a second film comprising essentially of said magnesium.

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