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Apparatus for application of coatings in vacuum

  • US 5,435,900 A
  • Filed: 11/04/1993
  • Issued: 07/25/1995
  • Est. Priority Date: 11/04/1992
  • Status: Expired due to Term
First Claim
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1. An apparatus for the application of coatings in a vacuum comprising a plasma guide surrounded by a magnetic deflecting system communicating with a first plasma source contained within the plasma guide and a main chamber adjoining the plasma guide in which a substrate holder is arranged off of an optical axis of the plasma source, the plasma source being surrounded by electromagnets,characterized in that the plasma guide has the form of a parallelepiped and the magnetic deflecting system is formed by linear conductors arranged along edges of the parallelepiped, the plasma guide being provided with plates carrying diaphragm filters, the plates being connected to the positive pole of a current source and installed on one or more walls of the plasma guide which are not occupied by the plasma source.

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