Apparatus for measuring relative movement using a diffraction grating having an orthogonally polarized input beam

• US 5,436,724 A
• Filed: 10/02/1992
• Issued: 07/25/1995
• Est. Priority Date: 10/03/1991
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Ishizuka, Koh, Nishimura, Tetsuharu
• Primary Examiner(s): Turner, Samuel A.
• Application Number:
  US07/956,059
• Time in Patent Office: 1,026 Days
• Field of Search: 356/356, 356/354, 356/349, 356/351, 356/345, 356/358, 250/237 G, 250/231.14
• US Class Current: 356/488
• CPC Class Codes: G01D 5/38 by diffraction gratings
• CPC Class Codes: G03F 9/7049 Technique, e.g. interferometric

Abstract

An apparatus for measuring relative movement by the use of a diffraction grating includes a light beam generating portion generating a light beam including light wave components having planes of polarization orthogonal to each other, an interference optical system for directing the light beam from the light beam generating portion to the diffraction grating, the light beam directed by the interference optical system being diffracted by the diffraction grating to thereby at least create two diffracted light beams of different orders having planes of polarization orthogonal to each other, the interference optical system being disposed so as to superpose the two diffracted lights one upon the other or upon other light and cause them to interfere with each other, and a detecting system for detecting the interfering light beams from the interference optical system. The relative movement of the diffraction grating and the interference optical system is measured by the detection by the detecting system. The interference optical system has in at least a portion of the optical path from the diffraction grating to the detecting system a polarization maintaining optical fiber for propagating the two diffracted light beams therethrough.

Claims

1. An apparatus for effecting a measurement of relative movement by the use of a diffraction grating, comprising:

a light beam generating portion generating a light beam including light wave components having planes of polarization orthogonal to each other;

an interference optical system for directing the light beam from said light beam generating portion to the diffraction grating, the light beam directed by said interference optical system being diffracted by the diffraction grating to thereby at least create two diffracted light beams of different orders, said interference optical system causing the polarization condition of at least one of the two diffracted light beams to vary and causing said two diffracted light beams to to enter said diffraction grating again, so that two rediffracted light beams diffracted by the diffraction grating are directed in the same direction and are superposed; and

a detecting system for causing said two rediffracted light beams to interfere with each other and detecting the interfering light beam, the relative movement of said diffraction grating and said interference optical system being measured by the detection by said detecting system;

said interference optical system having in at least a portion of the optical path from the diffraction grating to said detecting system a polarization maintaining optical fiber for propagating the two rediffracted light beams therethrough.

2. An apparatus according to claim 1, wherein said polarization maintaining optical fiber has an f-axis and an s-axis, wherein the f-axis and s-axis of said polarization maintaining optical fiber are disposed so as to be parallel to or form 45°

with respect to the directions of the planes of polarization of the two rediffracted light beams created by the diffraction grating.

3. An apparatus according to claim 1, wherein said polarization maintaining optical fiber has an f-axis and an s-axis, wherein the f-axis and s-axis of said polarization maintaining optical fiber and the planes of polarization of the two rediffracted light beams form 45°

therebetween, and the following condition is satisfied;

space="preserve" listing-type="equation">0.9<

(1/4+n)·

λ

.sub.0 /(β

·

L)<

1.1,

where L is the length of said polarization maintaining optical fiber, β

is the mode refractive index of said plane-of-polarization holding fiber, λ

₀ is the wavelength of the light beam from said light beam generating portion, and n is an integer.

4. An apparatus according to claim 1, wherein the two rediffracted light beams are of different frequencies, wherein said detecting system forms a beat signal from the interference light beam by the two diffracted lights, and wherein the relative movement of the diffraction grating and said interference optical system is measured from the phase difference of the beat signal from a predetermined signal.

5. An apparatus according to claim 4, wherein the predetermined signal is formed from the interference light beam of lights of different frequencies from said light beam generating portion.

6. An apparatus according to claim 4, wherein the predetermined signal is formed from the interference light of two rediffracted light beams differing in frequency from each other and discrete from the two rediffracted light beams from the diffraction grating.

7. An apparatus according to claim 1, wherein said polarization maintaining optical fiber serves also as optical means for forming the optical path from said light beam generating portion to the diffraction grating.

8. An apparatus according to claim 7, wherein said interference optical system has an optical element for separating emergent light from said polarization maintaining optical fiber in each plane of polarization, between that end of a plane-of-polarization holding fiber which is adjacent to the diffraction grating and the diffraction grating, and wherein said optical element combines the two rediffracted light beams and directs them to said polarization maintaining optical fiber.

9. An apparatus according to claim 1, wherein said interference optical system creates from the two rediffracted light beams a second interference light beam forming a light intensity signal differing in phase from said interference light beam, wherein said detecting system further detects said second interference light beam, and the amount and direction of relative movement of said interference optical system and the diffraction grating are detected by the detection of said two interference light beams.

10. A driving system comprising:

a diffraction grating provided on one of two objects moving relative to each other;

a measuring system for measuring the relative movement of the two objects moving relative to each other, said measuring system including;

(1) a light beam generating portion generating a light beam including light wave components having planes of polarization orthogonal to each other;

(2) an interference optical system provided on the other of the two objects moving relative to each other, said interference optical system directing the light beam from said light beam generating portion to the diffraction grating, the light beam directed by said interference optical system being diffracted by the diffraction grating to thereby at least create two diffracted light beams of different orders, said interference optical system causing the polarization condition of at least one of the two diffracted light beams to vary and causing said two diffracted light beams to enter said diffraction grating again, so that two rediffracted light beams diffracted by the diffraction grating are directed in the same direction and are superposed; and

(3) a detecting system for causing said two rediffracted light beams to interfere with each other and detecting the interfering light beam, the relative movement of said diffraction grating and said interference optical system being measured by the detection by said detecting system;

said interference optical system having in at least a portion of the optical path from said diffraction grating to said detecting system a polarization maintaining optical fiber for propagating the two rediffracted light beams therethrough;

a driving system for driving said two objects relative to each other; and

a control system for controlling said driving system on the basis of the result of the measurement by said measuring system.