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Dual absolute pressure sensor and method thereof

  • US 5,437,189 A
  • Filed: 05/03/1994
  • Issued: 08/01/1995
  • Est. Priority Date: 05/03/1994
  • Status: Expired due to Term
First Claim
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1. A dual absolute pressure sensor, comprising:

  • a glass substrate having first and second surfaces wherein said glass substrate distribute a common temperature to said first and second surfaces for increased accuracy of the dual absolute pressure sensor;

    a first sensor die attached to said first surface of said glass substrate to form a first cavity having a first reference pressure, said first sensor die measuring a first differential pressure between said first reference pressure and an outside surface of said first sensor die at which is applied a first external pressure for providing a first electrical signal representative of said first differential pressure anda second sensor die attached to said second surface of said glass substrate to form a second cavity having a second reference pressure, said second sensor die measuring a second differential pressure between said second reference pressure and an outside surface of said second sensor die at which is applied a second external pressure for providing a second electrical signal representative of said second differential pressure.

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