Method for suppression of electrification
First Claim
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1. A method for suppression of electrification which comprises a step of forming on a substrate a water-soluble electrification-suppressing film having an electron conductivity and comprising an electron conducting polymer having a π
- -electron conjugated system, and a step of irradiating a charged particle beam onto the substrate;
said charged particle beam being an electron or ion beam.
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Abstract
Electrification is suppressed with a water-soluble electrification-suppressing film having an electron conductivity and comprising a polymer resin. A high electrification-suppressing effect which is also high in vacuum can be easily obtained by using the electrification-suppressing film with less contamination.
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Citations
10 Claims
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1. A method for suppression of electrification which comprises a step of forming on a substrate a water-soluble electrification-suppressing film having an electron conductivity and comprising an electron conducting polymer having a π
- -electron conjugated system, and a step of irradiating a charged particle beam onto the substrate;
said charged particle beam being an electron or ion beam.
- -electron conjugated system, and a step of irradiating a charged particle beam onto the substrate;
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2. A method for suppression of electrification which comprises a step of forming on a substrate a water-soluble electrification-suppressing film having an electron conductivity and comprising an electron conducting polymer having a unit structure in which anionic groups are covalently bonded to the main chain and having a π
- -electron conjugated system, and a step of irradiating a charged particle beam onto the substrate;
said charged particle beam being an electron or ion beam.
- -electron conjugated system, and a step of irradiating a charged particle beam onto the substrate;
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3. A method for suppression of electrification which comprises a step of forming on a substrate a water-soluble electrification-suppressing film having an electron conductivity and comprising an electron conducting polymer having a π
- -electron conjugated system, and a step of irradiating a charged particle beam onto the substrate, said charged particle beam being an electron or ion beam, and further comprises a step of forming a first layer on a substrate prior to or after the step of forming said water-soluble electrification-suppressing film.
- View Dependent Claims (4, 6)
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5. A method for suppression of electrification which comprises a step of forming on a substrate a water-soluble electrification-suppressing film having an electron conductivity and comprising an electron conducting polymer having a π
- -electron conjugated system, and a step of irradiating a charged particle beam onto the substrate, said charged particle beam being an electron or ion beam, and further comprises a step of forming a first layer on a substrate and a step of forming a resist layer wherein any of the latter two steps is carried out prior to or after the step of forming said water-soluble electrification-suppressing film.
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7. A method for suppression of electrification which comprises a step of forming on a substrate a water-soluble electrification-suppressing film having an electron conductivity and comprising an electron conducting polymer having a π
- -electron conjugated system, and a step of irradiating a charged particle beam onto the substrate, said charged particle beam being an electron or ion beam, and further comprises a step of forming a first layer on a substrate, a step of forming on the first layer a second layer different from the first layer in etching characteristics and a step of forming a resist layer wherein any of the latter three steps is carried out prior to or after the step of forming said water-soluble electrification-suppressing film.
- View Dependent Claims (8, 9, 10)
Specification