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Thin film micromechanical resonator gyro

  • US 5,438,231 A
  • Filed: 08/23/1993
  • Issued: 08/01/1995
  • Est. Priority Date: 08/23/1993
  • Status: Expired due to Term
First Claim
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1. A thin film micromechanical resonator, comprising:

  • (a) a non-piezoelectric tuning fork having two tines;

    (b) a piezoelectric thin film disposed on each tine of the fork; and

    (c) at least three electrodes connected to each thin film, a first electrode being connected to a first side of each piezoelectric thin film and second and third electrodes being connected to a second side of each thin film;

    such that the application of an alternating voltage to the electrodes causes the fork to resonate.

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