Acceleration sensor having fault diagnosing device

• US 5,438,859 A
• Filed: 09/24/1992
• Issued: 08/08/1995
• Est. Priority Date: 09/24/1991
• Status: Expired due to Term

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Inoue, Jiro, Yamashita, Muneharu, Tabota, Jun, Mizuno, Toshihiro
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US07/950,478
• Time in Patent Office: 1,048 Days
• Field of Search: 73/1 D, 73/497, 73/517 R, 280/735, 310/315, 310/316, 310/326, 310/329, 310/338, 310/340
• US Class Current: 73/1.38
• CPC Class Codes: G01P 1/006 used for thermal compensation
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/0922 of the bending or flexing mode type
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

An acceleration sensor includes a piezoelectric element for outputting an electric signal corresponding to acceleration applied thereto, a signal processor for processing a signal outputted from the piezoelectric element, an AC signal outputting device for receiving an externally inputted signal and generating an AC signal which is synchronized with the period of the timing signal in response to receipt of the timing signal and for applying the AC signal to the piezoelectric element, and a capacitor connected between the AC signal outputting device and the piezoelectric element for detecting a fault in the acceleration sensor.

Claims

1. An acceleration sensor comprising:

an acceleration detecting portion comprising a piezoelectric element having electrodes on both its surfaces for outputting a signal corresponding to acceleration applied thereto and a supporting base for supporting said piezoelectric element;

said acceleration detecting portion being provided with a pair of detecting portions arranged so as to be brought into contact with said piezoelectric element and spaced apart from each other by a predetermined distance;

a signal processor electrically connected to one of the electrodes of said piezoelectric element and for processing the electric signal outputted from the piezoelectric element; and

a signal outputting device electrically connected to one of said pair of detecting portions so as to cause a predetermined current to flow between said detecting portions and connected to said signal processor so as to output to the signal processor a state signal representing the state of the acceleration detecting portion,

said signal outputting device outputting said state signal in conformity with the variation of the current flowing between the detecting portions.

2. The acceleration sensor according to claim 1, wherein said pair of detecting portions is provided between said piezoelectric element and the supporting base.

3. The acceleration sensor according to claim 2, wherein said supporting base is constituted by a pair of supporting members arranged spaced apart from each other by a predetermined distance,

an electrode constituting said pair of detecting portions being formed on the upper surface of said pair of supporting members.

4. The acceleration sensor according to claim 3, wherein said pair of supporting members is arranged so as to support the piezoelectric element in both ends of the piezoelectric element or in the vicinity thereof.

5. The acceleration sensor according to claim 2, wherein said supporting base is arranged so as to support the piezoelectric element in one end of the piezoelectric element or in the vicinity thereof,

a pair of electrodes constituting said pair of detecting portions arranged spaced apart from each other by a predetermined distance being formed on the upper surface of said supporting base.

6. The acceleration sensor according to claim 1, wherein said signal processor comprises:

an impedance converter electrically connected to the piezoelectric element for converting an impedance of the signal outputted from the piezoelectric element to an impedance that matches an impedance of the signal processor;

a filter electrically connected to the impedance converter for removing an unnecessary signal component, and

an amplifier electrically connected to said filter for amplifying a signal applied from the filter.

7. The acceleration sensor according to claim 1, wherein at least a part of said signal processor is constituted by a single electronic component having a flat upper surface,

said piezoelectric element being fixed to said upper surface of said electronic component in a cantilevered arrangement.

8. The acceleration sensor according to claim 1, which further comprises a temperature compensating capacitor arranged in close proximity to said piezoelectric element and connected in parallel to the piezoelectric element.

9. The acceleration sensor according to claim 1, wherein at least a part of said signal processor is constituted by a single electronic component, and which further comprises a base plate for supporting said electronic component, a cushioning member for absorbing a thermal shock produced between the base plate and said electronic component due to the difference in coefficient of thermal expansion or modulus of elasticity being arranged between the base plate and the electronic component.

10. An acceleration sensor according to claim 6, further comprising:

an electric component constituting at least a part of said signal processor having a flat upper surface, said electronic component having an electrode electrically connected to the piezoelectric element, said electrode being located on an upper surface of the electronic component, said piezoelectric element being fixed to the upper surface of the electronic component in a cantilevered arrangement.

11. The acceleration sensor according to claim 10, which further comprises a package structure for containing said electronic component and the piezoelectric element, said package structure comprising a base plate and a cap secured to the base plate,

said electronic component being secured on said base plate.

12. The acceleration sensor according to claim 10, which further comprises a temperature compensating capacitor arranged in close proximity to said piezoelectric element and connected in parallel to the piezoelectric element.

13. The acceleration sensor according to claim 10, wherein at least a part of said signal processor is constituted by a single electronic component, and which further comprises a base plate for supporting said electronic component, a cushioning member for absorbing a thermal shock produced between the base plate and said electronic component due to the difference in coefficient of thermal expansion or modulus of elasticity being arranged between the base plate and the electronic component.