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Rotation rate sensor

  • US 5,438,870 A
  • Filed: 12/30/1993
  • Issued: 08/08/1995
  • Est. Priority Date: 10/13/1990
  • Status: Expired due to Term
First Claim
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1. Rotation rate sensor with a multi-layer sensor element having first and second layers (10, 21), whereinsaid first layer is a generally planar carrier (10) of monocrystalline silicon having a major surface;

  • said second layer (21) comprises polysilicon and defines at least one structural element (30) which acts as an oscillatory body, being capable of oscillation in at least a first oscillation direction (1) oriented parallel to said major surface of said planar carrier (10),said structural element (30) is supported on said major surface of said planar carrier (10) by a plurality of support strips (31),said structural element (30) is deflectable (2) normal to said major surface of said carrier (10); and

    further comprising capacitive or piezoresistive detecting means (17, 181;

    21,

         182) for detecting Coriolis force deflections (2), perpendicular to said major surface of said carrier (10), of said structural element (30), formed from said second layer.

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