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Gas flow type angular velocity sensor and method of constructing same

  • US 5,438,871 A
  • Filed: 05/29/1992
  • Issued: 08/08/1995
  • Est. Priority Date: 06/19/1991
  • Status: Expired due to Fees
First Claim
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1. In a gas flow type angular velocity sensor, of the type for detecting an angular velocity from a change of resistance in each of paired heat wires having temperature-sensitive resistance, when a flow of gas forced into a gas path in a sensor body through a nozzle hole and directed toward the pair of heat wires is deflected by the action of an angular velocity on the sensor body, the improvement comprising:

  • a first semiconductor substrate having a gas path groove formed thereon;

    a second semiconductor substrate having a substantially flat surface; and

    each of said heat wires of the pair of heat wires having a first portion mounted on said substantially flat surface and a second portion extending toward the other said heat wire of said pair of heat wires, said second portions of said pair of heat wires being spaced from a portion of said substantially flat surface for forming a single bridge shape over said portion of .said substantially flat surface of said second semiconductor substrate, whereinsaid first and second semiconductor substrates are bonded to each other to form the sensor body, with said gas path groove of said first semiconductor substrate positioned adjacent to essayed substantially flat surface of said second semiconductor substrate, and said pair of heat wires extending into said gas path groove.

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