Modular diaphragm pressure sensor with peripheral mounted electrical terminals

• US 5,438,876 A
• Filed: 08/05/1993
• Issued: 08/08/1995
• Est. Priority Date: 08/05/1993
• Status: Expired due to Fees

• Current Assignee: The Foxboro Company (Schneider Electric SE)
• Original Assignee: The Foxboro Company (Schneider Electric SE)
• Inventors: Lewis, Brian D.
• Primary Examiner(s): Chilcot, Jr., Richard E.
• Assistant Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/102,554
• Time in Patent Office: 733 Days
• Field of Search: 73/727, 73/726, 73/720, 73/721, 338/4, 338/42, 29/621.1
• US Class Current: 73/726
• CPC Class Codes: G01L 19/0038 being part of the housing other details about the housing G01L19/14
• CPC Class Codes: G01L 19/0084 to the outside of the housing other details about the housing see G01L19/14
• CPC Class Codes: G01L 19/0645 using isolation membranes, specially adapted for protection
• CPC Class Codes: G01L 19/141 Monolithic housings, e.g. molded or one-piece housings
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

A modular pressure sensor has a pressure-sensing element, electrical terminals, interconnections, and a support substrate. The pressure-sensing element produces an electrical signal indicative of pressure at local contacts and the interconnections apply the signal to the electrical terminals. The electrical terminals are secured to the substrate and extend along a peripheral surface of the substrate. The modular pressure sensor can mount, with different orientations, to a header to form a pressure transducer.

Claims

1. Pressure sensor apparatus comprising

A. a substrate having a first surface and having a first through passage therein open at said first surface and having a second surface peripheral to said first surface, and a platform surface opposed to and spaced from said first surface,

B. a pressure-sensing element having a pressure responsive diaphragm with third and fourth opposed diaphragm surfaces and having at least one electrical contact at which it produces a signal responsive to the deflection of said diaphragm, said sensing element being mounted to said platform surface of said substrate and forming with said substrate a first chamber communicating with the opening of said first through passage at said first surface and bounded at least in part by said platform surface of said substrate and said third surface of said diaphragm,

C. at least one electrical terminal mounted with said substrate and disposed at least in part external to said peripheral surface, said electrical terminal extending in a direction from said first surface to said platform surface and beyond said platform surface along at least a portion of said peripheral surface, said electrical terminal being arranged for removable and replaceable connection with a further connector element, and

D. means forming an electrical connection extending between said contact and said electrical terminal, said means including a metalization path within said substrate

2. Pressure sensor apparatus according to claim 1 wherein said substrate is formed of layers of electrically non-conducting material.

3. Pressure sensor apparatus according to claim 1 wherein said electrical terminal extends transverse to said first surface and extends beyond said peripheral surface and away from said first surface.

4. Pressure sensor apparatus according to claim 1 wherein said electrical terminal is brazed to said peripheral surface.

5. Pressure sensor apparatus according to claim 1 wherein said means forming an electrical connection comprises at least one metalization path formed between said first chamber and said electrical terminal and further comprises at least one wire bond extending between one said contact and said metalization path.

6. Pressure sensor apparatus according to claim 1, further comprising a second chamber bounded at least in part by said platform surface and said fourth surface of said diaphragm, and wherein the through passage opens at the platform surface.

7. Pressure sensor apparatus according to claim 6 wherein said electrical terminal extends transverse to said platform surface and extends beyond said peripheral surface away from said platform surface.

8. Pressure sensor apparatus according to claim 6 wherein said electrical terminal extends along said peripheral surface in the direction between said first surface and said platform surface and extends beyond said substrate.

9. Pressure sensor apparatus according to claim 6 wherein said electrical terminal extends between said platform surface and said first surface and beyond said substrate.

10. Pressure sensor apparatus according to claim 6, further comprising housing means mounting said substrate with said electrical terminal accessible for electrical connection externally of said housing means, said housing means having a base element having an aperture therethrough in fluid communication with said second chamber.

11. Pressure sensor apparatus comprising

A. a substrate having a first surface, a second surface peripheral to said first surface, a platform surface opposed to and spaced from said first surface, and a first through passage extending from said first surface to said platform surface,

B. a pressure-sensing element having a pressure responsive diaphragm with third and fourth opposed diaphragm surfaces and having at least one electrical contact at which it produces a signal responsive to the deflection of said diaphragm, said sensing element being mounted to said substrate and forming with said substrate a first chamber communicating with the opening of said first through passage at said first surface and bounded at least in part by said platform surface of said substrate and said third surface of said diaphragm,

C. at least one electrical terminal mounted with said substrate and disposed at least in part external to said peripheral surface, said electrical terminal extending along at least a portion of said peripheral surface and arranged for removable and replaceable connection with a further connector element,

D. means forming an electrical connection extending between said contact and said electrical terminal, said means including a metalization path within said substrate,

E. a second chamber bounded at least in part by said platform surface and said fourth surface of said diaphragm, and

F. lid means having an aperture formed therethrough, said lid means being mounted to said substrate adjacent said platform surface.

12. Pressure sensor apparatus according to claim 11, wherein said lid means overlies said platform surface and seals said second chamber with regard to pressure, said lid means having an aperture for communicating between said second chamber and a selected pressure passageway.

13. Pressure sensor apparatus, comprising

A. a substrate having a first surface and having a first through passage therein open at said first surface and having a second surface peripheral to said first surface, said substrate further having a platform surface opposed to and spaced from said first surface,

B. a pressure-sensing element having a pressure responsive diaphragm with third and fourth opposed diaphragm surfaces and having at least one electrical contact at which it produces a signal responsive to the deflection of said diaphragm, said sensing element being mounted with said substrate and forming with said substrate a first chamber communicating with the opening of said first through passage at said first surface and bounded at least in part by said platform surface of said substrate and said third surface of said diaphragm, said through passage opening at said platform surface,

C. and forming with said sensing element a second chamber bounded at least in part by said platform surface and said fourth surface of said diaphragm,

D. at least one electrical terminal mounted with said substrate and disposed at least in part external to said peripheral surface, said electrical terminal extending along at least a portion of said peripheral surface and arranged for removable and replaceable connection with a further connector element,

E. means forming an electrical connection extending between said contact and said electrical terminal, and

F. header means having a housing and an isolation diaphragm, said substrate being mountingly secured to said header means for sealing one of said first and second chambers closed with said isolation diaphragm.

14. Pressure sensor apparatus according to claim 13 further comprising pressure responsive fluid contained within a fluid chamber bounded, at least in part, by said isolation diaphragm and by said pressure-sensing element.

15. Pressure sensor apparatus comprising

A. a substrate having a first surface and having a first through passage therein open at said first surface and having a second surface peripheral to said first surface,

B. a pressure-sensing element having a pressure responsive diaphragm with third and fourth opposed diaphragm surfaces and having at least one electrical contact at which it produces a signal responsive to the deflection of said diaphragm, said sensing element being mounted to said substrate and forming with said substrate a first chamber communicating with the opening of said first through passage at said first surface and bounded at least in part by said platform surface of said substrate and said third surface of said diaphragm,

C. at least one electrical terminal mounted with said substrate and disposed at least in part external to said peripheral surface, said electrical terminal extending along at least a portion of said peripheral surface and arranged for removable and replaceable connection with a further connector element,

D. means forming an electrical connection extending between said contact and said electrical terminal, said means including a metalization path within said substrate, and

E. housing means mounting said substrate with said electrical terminal accessible for electrical connection externally of said housing means, said housing means having a base element having an aperture therethrough in fluid communication with said first chamber.

16. Pressure sensor apparatus comprising

A. a substrate having first and second opposed sides and a passage extending therebetween, said substrate having at least one peripheral surface extending between said opposed sides,

B. at least one electrical terminal for external electrical connection to said apparatus, said terminal being mounted to said substrate and extending in a direction from said first side to said second side and beyond said second side along at least a portion of said peripheral surface, said electrical terminal being structured for removable and replaceable connection with a further connector element,

C. a pressure-sensing element mounted to said second side of said substrate and spanning said passage to form first and second chambers, said pressure-sensing element having a diaphragm and contact means, and developing at said contact means an electrical signal responsive to the difference in pressure in said first and second chambers,

D. at least one electrical connection means communicating between said contact means and said electrical terminal, said electrical connection means including a metalization path within said substrate, and

E. lid means having an aperture formed therethrough, said lid means being mounted to said substrate for spanning said second chamber.