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Semiconductor integrated-circuit capacitor having a carbon film electrode

  • US 5,440,157 A
  • Filed: 07/16/1993
  • Issued: 08/08/1995
  • Est. Priority Date: 07/17/1992
  • Status: Expired due to Term
First Claim
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1. A semiconductor integrated-circuit capacitor comprising a lower electrode formed on a semiconductor substrate, a capacitor insulating film formed on said lower electrode, and an upper electrode formed on said insulating film,wherein said capacitor insulating film comprises a high-permittivity material, and only one of said upper electrode and said lower electrode comprises a carbon film.

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