Surface property detection apparatus and method
First Claim
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1. A method for detecting corrosion on the surface of a remote conductive sample, the method comprising the steps of:
- forming a modified confocal resonator comprising a reflecting surface spaced from the sample;
generating electromagnetic radiation at the resonant frequency of the resonator in the frequency range of 109 to 1012 Hz;
detecting changes in the complex permittivity of the surface of the remote conductive sample from the electromagnetic radiation; and
detecting the corrosion as a function of the change in complex permittivity,
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Abstract
Apparatus and method for detecting, determining, and imaging surface resistance corrosion, thin film growth, and oxide formation on the surface of conductors or other electrical surface modification. The invention comprises a modified confocal resonator structure with the sample remote from the radiating mirror. Surface resistance is determined by analyzing and imaging reflected microwaves; imaging reveals anomalies due to surface impurities, non-stoichiometry, and the like, in the surface of the superconductor, conductor, dielectric, or semiconductor.
30 Citations
3 Claims
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1. A method for detecting corrosion on the surface of a remote conductive sample, the method comprising the steps of:
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forming a modified confocal resonator comprising a reflecting surface spaced from the sample; generating electromagnetic radiation at the resonant frequency of the resonator in the frequency range of 109 to 1012 Hz; detecting changes in the complex permittivity of the surface of the remote conductive sample from the electromagnetic radiation; and detecting the corrosion as a function of the change in complex permittivity,
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2. A method for detecting thin film growth on the surface of a remote conductive sample, the method comprising the steps of:
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forming a modified confocal resonator comprising a reflecting surface spaced from the sample; generating electromagnetic radiation at the resonant frequency of the resonator in the frequency range of 109 to 1012 Hz; detecting changes in the complex permittivity of the surface of the remote conductive sample from the electromagnetic radiation; and detecting the thin film growth as a function of the changes in complex permittivity.
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3. A method for detecting etching behavior on the surface of a remote conductive sample, the method comprising the steps of:
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forming a modified confocal resonator comprising a reflecting surface spaced from the sample; generating electromagnetic radiation at the resonant frequency of the resonator in the frequency range of 109 to 1012 Hz; detecting changes in the complex permittivity of the surface of the remote conductive sample from the electromagnetic radiation; and detecting the etching behavior as a function of the changes in complex permittivity.
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Current AssigneeSandia Corporation (Martin Marietta Corporation)
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Original AssigneeSandia Corporation (Martin Marietta Corporation)
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InventorsMartens, Jon S., Ginley, David S., Hietala, Vincent M., Sorensen, Neil R.
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Primary Examiner(s)Wieder, Kenneth A.
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Assistant Examiner(s)Solis, Jose M.
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Application NumberUS07/948,535Time in Patent Office1,051 DaysField of Search324/644, 324/632, 324/633, 324/636, 324/635, 324/642, 117/201, 118/712US Class Current324/636CPC Class CodesG01R 27/06 Measuring reflection coeffi...Y10T 117/1004 with means for measuring, t...
