Three-dimensional periodic dielectric structures having photonic bandgaps
First Claim
1. A method of fabricating a periodic dielectric structure having a three-dimensional photonic bandgap, said method comprising the steps of:
- (a) providing a substrate;
(b) applying a layer of a first material having a first dielectric constant on said substrate;
(c) forming a plurality of parallel grooves along a first axis lying in the plane of said layer;
(d) filling said plurality of grooves with a second material having a second dielectric constant;
(e) applying a further layer of said first material to overlie the previous layer of first material and filled grooves;
(f) repeating steps (c)-(e) a predetermined number of times to form a multi-layered structure; and
(g) forming a plurality of parallel channels through said multi-layered structure in a second axis orthogonal to the plane of the layers, said channels being adapted to comprise a third material having a third dielectric constant, thereby resulting in said structure having three-dimensional periodicity.
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Abstract
A periodic dielectric structure and method of fabricating same, the structure having a three-dimensional photonic bandgap. The structure includes a plurality of layers, each layer having a stratum of a first material having a first dielectric constant and a plurality of parallel grooves along a first axis lying in the plane of the layer, the grooves including a second material having a second dielectric constant; and a plurality of parallel channels formed through the plurality of layers in a second axis orthogonal to the plane of the layers, the channels being adapted to comprise a third material having a third dielectric constant, thereby resulting in the structure having three-dimensional periodicity. In preferred embodiments, the second and third materials include air.
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Citations
20 Claims
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1. A method of fabricating a periodic dielectric structure having a three-dimensional photonic bandgap, said method comprising the steps of:
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(a) providing a substrate; (b) applying a layer of a first material having a first dielectric constant on said substrate; (c) forming a plurality of parallel grooves along a first axis lying in the plane of said layer; (d) filling said plurality of grooves with a second material having a second dielectric constant; (e) applying a further layer of said first material to overlie the previous layer of first material and filled grooves; (f) repeating steps (c)-(e) a predetermined number of times to form a multi-layered structure; and (g) forming a plurality of parallel channels through said multi-layered structure in a second axis orthogonal to the plane of the layers, said channels being adapted to comprise a third material having a third dielectric constant, thereby resulting in said structure having three-dimensional periodicity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A periodic dielectric structure having a three-dimensional photonic bandgap, comprising:
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a plurality of layers, each layer including a stratum of a first material having a first dielectric constant and a plurality of parallel grooves along a first axis in the plane of said layer, said grooves comprising a second material having a second dielectric constant; and a plurality of parallel channels formed through said plurality of layers in a second axis orthogonal to the plane of the layers, said channels being adapted to comprise a third material having a third dielectric constant, thereby resulting in said structure having three-dimensional periodicity. - View Dependent Claims (16, 17, 18, 19)
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20. A method of fabricating a periodic dielectric structure having a three-dimensional photonic bandgap, said method comprising the steps of:
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forming a plurality of layers, each layer including a stratum of a first material having a first dielectric constant and a plurality of parallel grooves along a first axis lying in the plane of said layer, said grooves comprising a second material having a second dielectric constant; and forming a plurality of parallel channels through said plurality of layers in a second axis orthogonal to the plane of the layers, said channels being adapted to comprise a third material having a third dielectric constant, thereby resulting in said structure having three-dimensional periodicity.
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Specification