Reference element for high accuracy silicon capacitive pressure sensor

• US 5,440,931 A
• Filed: 10/25/1993
• Issued: 08/15/1995
• Est. Priority Date: 10/25/1993
• Status: Expired due to Fees

• Current Assignee: VTI Holding Oy
• Original Assignee: United Technologies Corporation (Raytheon Technologies Corporation d/b/a RTX)
• Inventors: Bullis, Robert H., Wiegand, Walter J., Gobetz, Frank W.
• Primary Examiner(s): Chilcot, Jr., Richard E.
• Assistant Examiner(s): Oen, William L.
• Application Number:
  US08/142,236
• Time in Patent Office: 659 Days
• Field of Search: 73/718, 73/724, 73/517 R, 29/25.41, 361/283.3
• US Class Current: 73/724
• CPC Class Codes: G01L 19/02 Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means for aneroid barometers G01L7/14
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm

Abstract

A dual-element, parallel-plate silicon capacitative pressure sensor includes a pressure sensing element and a reference element of identical structure. Both elements are fabricated from the same silicon wafers using identical processing steps. Further, both elements are simultaneously mounted to a header using identical mounting steps. Such identical fabrication and mounting steps serve to identically match the dielectric materials and, thus, the aging properties of both the sensing and reference elements. By matching the sensing and reference elements in these ways, and by aging these components at elevated temperatures in exactly the same way, it is possible to achieve an extremely close match in long-term dielectric aging properties.

Claims

1. A silicon capacitive pressure sensor, comprising:

a. a header;

b. a sensing element having a conductive silicon sensing substrate and a conductive silicon sensing diaphragm separated by a first dielectric spacer, and having a conductive silicon sensing transition element separated from the sensing diaphragm by a second dielectric spacer, wherein the sensing transition element is mounted to a surface of the header, and wherein the sensing substrate and sensing diaphragm are arranged to form the parallel plates of a sensing capacitor; and

c. a reference element having a conductive silicon reference substrate and a conductive silicon reference diaphragm separated by a third dielectric spacer, and having a conductive silicon reference transition element separated from the reference diaphragm by a fourth dielectric spacer, wherein the reference transition element is mounted to the surface of the header, and wherein the reference substrate and reference diaphragm are arranged to form the parallel plates of a reference capacitor.

2. The silicon capacitive pressure sensor of claim 1, wherein the reference substrate is formed from the same silicon wafer as the sensing substrate.

3. The silicon capacitive pressure sensor of claim 1, wherein the reference diaphragm is formed from the same silicon wafer as the sensing diaphragm.

4. The silicon capacitive pressure sensor of claim 1, wherein the reference transition element is formed from the same silicon wafer as the sensing transition element.

5. The silicon capacitive pressure sensor of claim 1, wherein the sensing transition element has a throughbore formed therein for applying a fluid therethrough to a first surface of the sensing diaphragm, the sensing diaphragm being operable to flex in a direction toward the sensing substrate in an amount corresponding to the pressure of the fluid applied to the first surface of the sensing diaphragm, the flexing of the sensing diaphragm being operable to change the capacitance between the sensing diaphragm and the sensing substrate.

6. The silicon capacitive pressure sensor of claim 5, wherein the header has a throughbore formed therein that is aligned coaxial with the sensing transition element throughbore, the header throughbore being operable to apply the fluid therethrough to the first surface of the sensing diaphragm.

7. The silicon capacitive pressure sensor of claim 1, wherein the first, second, third and fourth dielectric spacers comprise a borosilicate glass.

8. The silicon capacitive pressure sensor of claim 1, wherein the sensing substrate, sensing diaphragm, reference substrate and reference diaphragm are electrically connected to an electrical circuit responsive to the capacitance of both the sensing element and the reference element.

9. The silicon capacitive pressure sensor of claim 1, wherein the first dielectric spacer is disposed between the sensing substrate and sensing diaphragm at the perimeters thereof, thereby forming an enclosed chamber between the sensing substrate and sensing diaphragm.

10. The silicon capacitive pressure sensor of claim 9, wherein the enclosed chamber between the sensing substrate and sensing diaphragm is held at vacuum pressure.

11. The silicon capacitive pressure sensor of claim 1, wherein the third dielectric spacer is disposed between the reference substrate and the reference diaphragm at the perimeters thereof, thereby forming an enclosed chamber between the reference substrate and the reference diaphragm.

12. The silicon capacitive pressure sensor of claim 11, wherein the enclosed chamber between the reference substrate and the reference diaphragm is held at vacuum pressure.

13. The silicon capacitive pressure sensor of claim 1, wherein the sensing substrate has a mesa formed on a surface of the sensing substrate that is opposite a facing surface of the sensing diaphragm.

14. The silicon capacitive pressure sensor of claim 1, wherein the reference substrate has a mesa formed on a surface of the reference substrate that is opposite a facing surface of the reference diaphragm.

15. The silicon capacitive pressure sensor of claim 1, wherein the fourth dielectric spacer is disposed between the reference transition element and reference diaphragm at the perimeters thereof, thereby forming an enclosed vacuum chamber between the reference transition element and the reference diaphragm.

16. In a silicon capacitive pressure sensor including a sensing element having a silicon sensing substrate and a silicon sensing diaphragm separated by a first dielectric spacer, and having a silicon sensing transition element separated from the sensing diaphragm by a second dielectric spacer, wherein the improvement comprises a reference element having a silicon reference substrate and a silicon reference diaphragm separated by a third dielectric spacer, and having a silicon reference transition element separated from the reference diaphragm by a fourth dielectric spacer.

17. The sensor of claim 16, wherein the reference substrate is formed from the same silicon wafer as the sensing substrate.

18. The sensor of claim 16, wherein the reference diaphragm is formed from the same silicon wafer as the sensing diaphragm.

19. The sensor of claim 16, wherein the reference transition element is formed from the same silicon wafer as the sensing transition element.

20. In a capacitive pressure sensor that transduces the pressure value of an applied fluid into a corresponding capacitance value, having a sensing element made up of a sensing substrate and a sensing diaphragm separated by a first dielectric spacer, the sensing element also having a sensing transition element separated from the sensing diaphragm by a second dielectric spacer, the sensing element mounted to a leader, wherein the improvement comprises a reference element having a reference substrate and a reference diaphragm separated by a third dielectric spacer, the reference element also having a reference transition element separated from the reference diaphragm by a fourth dielectric spacer, the reference element being mounted to the header.