Turbomolecular pump with valves and integrated electronic controls
First Claim
1. A vacuum system comprising, as an integral assembly:
- a turbomolecular pump with a drive motor;
a vent valve for introducing gas into the turbomolecular pump for slowing the pump;
a purge valve for introducing purge gas into the turbomolecular pump;
a roughing valve for opening a foreline of the turbomolecular to a roughing pump; and
an electronic control module having a programmed processor for controlling the turbomolecular pump drive motor, vent valve, purge valve, and roughing valve, the processor being user programmable for establishing specific control sequences, the electronic control module being integral with but removable from the assembly and being connected to the turbomolecular pump, drive motor, vent valve, purge valve and roughing valve through a common connector assembly.
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Accused Products
Abstract
A vacuum system comprises, as an integral assembly, a turbomolecular pump with drive motor, a vent valve, a purge valve, a roughing valve, a heater and an electronic control module. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. Proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
105 Citations
28 Claims
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1. A vacuum system comprising, as an integral assembly:
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a turbomolecular pump with a drive motor; a vent valve for introducing gas into the turbomolecular pump for slowing the pump;
a purge valve for introducing purge gas into the turbomolecular pump;a roughing valve for opening a foreline of the turbomolecular to a roughing pump; and an electronic control module having a programmed processor for controlling the turbomolecular pump drive motor, vent valve, purge valve, and roughing valve, the processor being user programmable for establishing specific control sequences, the electronic control module being integral with but removable from the assembly and being connected to the turbomolecular pump, drive motor, vent valve, purge valve and roughing valve through a common connector assembly. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A vacuum system comprising:
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a turbomolecular vacuum pump; a purge valve for introducing purge gas into the turbomolecular pump to dilute gas being pumped by the turbomolecular pump; and a sensor for sensing that purge gas is being introduced into the turbomolecular pump. - View Dependent Claims (15, 16, 17, 18)
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19. A vacuum system comprising:
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a turbomolecular pump; and an electronic controller for controlling the turbomolecular pump, the controller responding to return of power after a power failure by sensing speed of the turbomolecular pump and continuing normal drive of the turbomolecular pump only if the speed of the turbomolecular pump is above a threshold value.
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20. A vacuum system comprising:
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a turbomolecular vacuum pump;
a vent valve for introducing gas into the turbomolecular pump for slowing the pump;a purge valve for introducing purge gas into the turbomolecular pump to dilute gas being pumped by the turbomolecular pump; a roughing valve for opening a foreline of the turbomolecular pump to a roughing pump; and an electronic controller for controlling shutdown of the vacuum system by turning off power to the turbomolecular pump and opening the vent valve, and subsequently closing the roughing valve.
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21. A vacuum system comprising:
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a turbomolecular vacuum pump; a vibration sensor; and electronics integral with the turbomolecular pump for storing vibration signals from the vibration sensor.
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22. A method of operating a turbomolecular vacuum pump comprising:
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opening a purge valve to introduce purge gas into the turbomolecular pump to dilute gas being pumped by the turbomolecular pump; and sensing that purge gas is being introduced into the turbomolecular pump. - View Dependent Claims (23, 24, 25, 26)
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27. A method of operating a turbomolecular vacuum pump comprising:
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supplying drive current to a drive motor of the turbomolecular pump; and responding to return of power after a power failure by sensing speed of the turbomolecular pump and continuing normal drive of the turbomolecular pump only if the speed of the turbomolecular pump is above a threshold value.
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28. A method of shutting down a turbomolecular pump comprising:
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removing power input to the turbomolecular pump drive motor and opening a vent valve; and subsequently closing a roughing valve between the turbomolecular pump and a roughing pump.
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Specification