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Method of inspecting solid body for foreign matter

  • US 5,444,480 A
  • Filed: 10/22/1993
  • Issued: 08/22/1995
  • Est. Priority Date: 10/26/1992
  • Status: Expired due to Fees
First Claim
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1. A method of inspecting a solid body for foreign matter thereon, comprising the steps of:

  • (a) producing an image signal representing an image of a solid body;

    (b) setting a level of an image signal which is higher than a predetermined upper limit to an upper limit and another level of an image signal which is lower than a predetermined lower limit to a lower limit; and

    (c) comparing at least three pixel points, which include a point of interest and surrounding points one on each side of the point of interest, in an inspected region of the image, and judging said point of interest as being an abnormal point if the point of interest is brighter or darker than said surrounding points.

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