Optimized electronic operation of digital micromirror devices
First Claim
1. A method of resetting a digital micromirror device comprising:
- biasing a pair of address electrodes of a digital micromirror device element, wherein a first voltage is applied to a first address electrode and a second voltage is applied to a second address electrode; and
biasing a deflectable structure with a third voltage, wherein said third voltage is less than said first voltage and greater than said second voltage.
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Accused Products
Abstract
A method for controlling a digital micromirror device 40 resulting in decreased mechanical stress, longer device lifetimes, decreased incidence of spontaneous bit reset, and increased pulse-width modulation accuracy. To reduce the device stress, the bias voltage 142 applied to the mirror 50 may be reduced after the mirror 50 has been latched. To prevent premature mirror changes, the address electrode bias voltage 140 may be reduced after the mirror is driven to the desired position. To ensure that the mirror 50 returns to the neutral position during reset, the mirror bias voltage 142 may be raised from ground potential to approximately halfway between the two addressing voltages during the reset period 152. To reduce the effects of hinge memory and to ensure that the mirror 50 rotates toward the proper address electrode, the mirror bias voltage 142 may be gradually increased to allow the mirror 50 time to rotate towards the proper address electrode.
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Citations
19 Claims
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1. A method of resetting a digital micromirror device comprising:
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biasing a pair of address electrodes of a digital micromirror device element, wherein a first voltage is applied to a first address electrode and a second voltage is applied to a second address electrode; and biasing a deflectable structure with a third voltage, wherein said third voltage is less than said first voltage and greater than said second voltage. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of operating a digital micromirror device comprising:
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biasing a pair of address electrodes of a digital micromirror device element, wherein a first voltage is applied to a first address electrode and a second voltage is applied to a second address electrode; biasing a deflectable structure with a third voltage; and increasing the bias applied to said first address electrode from said first voltage to a fourth voltage thereby increasing the deflection of said deflectable structure. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. A method of operating a digital micromirror device comprising:
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biasing a pair of address electrodes of a digital micromirror device element, wherein a first voltage is applied to a first address electrode and a second voltage is applied to a second address electrode; biasing a deflectable structure with a third voltage; and changing the bias applied to said deflectable structure gradually from said third voltage to a fourth voltage thereby increasing the deflection of said deflectable structure. - View Dependent Claims (15, 16)
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17. A method of biasing a digital micromirror device comprising:
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applying a first bias voltage to a deflectable structure, wherein said first bias voltage is greater than a minimum voltage required to deflect said deflectable structure to a limiting position; reducing said first bias voltage to a second bias voltage after said deflectable structure is driven to said limiting position, wherein the magnitude of said second bias voltage is less than the magnitude of said first bias voltage. - View Dependent Claims (18, 19)
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Specification