Monolithic detector array apparatus
First Claim
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1. An electromagnetic radiation detector comprising:
- (a) a substrate having a top surface and a bottom surface; and
(b) a microbridge suspended over the top surface, the microbridge including a diode means for detecting electromagnetic radiation wherein a space is formed below the microbridge by etching a pit beneath the microbridge.
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Abstract
A monolithic detector array apparatus for sensing infrared radiation. An array of semiconductor diode bolometers are fabricated on micromachined thermal isolation structures called microbridges. The detectors are configured in an array and addressed by row and column. Readout circuitry may be optionally incorporated onto a common substrate. The monolithic detector array may be highly integrated, resulting in a low cost and a high performance focal plane array.
37 Citations
16 Claims
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1. An electromagnetic radiation detector comprising:
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(a) a substrate having a top surface and a bottom surface; and (b) a microbridge suspended over the top surface, the microbridge including a diode means for detecting electromagnetic radiation wherein a space is formed below the microbridge by etching a pit beneath the microbridge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A monolithic detector focal plane array for detecting infrared radiation comprising:
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(a) a silicon substrate having a top surface and a bottom surface; and (b) a plurality of polysilicon microbridges where each polysilicon microbridge is positioned at one end in contact with the silicon substrate and at another end suspended freely above the silicon substrate forming a polysilicon diode. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification