Test circuit for large scale integrated circuits on a wafer
First Claim
1. A circuit for simultaneously testing at least two of a plurality of integrated circuits provided in dicing regions of a wafer comprising:
- an input test signal generating and transmitting means electrically connected to at least two of said plurality of integrated circuits through first interconnection means for generating input test signal patterns and for subsequently transmitting said input test signal patterns to each of said at least two integrated circuits; and
output test signal analyzing means directly electrically connected to each of said at least two integrated circuits through second interconnection means for analyzing output test signals output from each of said at least two integrated circuits in response to said input test signal patterns so as to conduct a test of each of said at least two integrated circuits simultaneously, a number of said analyzing means being equal to a number of integrated circuits to be simultaneously tested.
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Accused Products
Abstract
A test circuit for conducting a simultaneous test of a plurality of integrated circuits provided in dicing regions of a wafer. The test circuit has a pattern generator electrically connected to the integrated circuits through first interconnections for generating input signal patterns and subsequent transmission thereof to each of the integrated circuits and pattern compressor/comparator electrically connected to the integrated circuits through second interconnections for analyzing output signals fetched from the integrated circuits so as to conduct a simultaneous test of a plurality of the integrated circuits.
81 Citations
4 Claims
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1. A circuit for simultaneously testing at least two of a plurality of integrated circuits provided in dicing regions of a wafer comprising:
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an input test signal generating and transmitting means electrically connected to at least two of said plurality of integrated circuits through first interconnection means for generating input test signal patterns and for subsequently transmitting said input test signal patterns to each of said at least two integrated circuits; and output test signal analyzing means directly electrically connected to each of said at least two integrated circuits through second interconnection means for analyzing output test signals output from each of said at least two integrated circuits in response to said input test signal patterns so as to conduct a test of each of said at least two integrated circuits simultaneously, a number of said analyzing means being equal to a number of integrated circuits to be simultaneously tested. - View Dependent Claims (2, 3, 4)
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Specification