Acceleration sensor and method for manufacturing same

• US 5,447,067 A
• Filed: 03/08/1994
• Issued: 09/05/1995
• Est. Priority Date: 03/30/1993
• Status: Expired due to Term

• Current Assignee: Infineon Technologies AG
• Original Assignee: Siemens AG
• Inventors: Scheiter, Thomas, Klose, Helmut, Biebl, Markus
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): Noori, Max H.
• Application Number:
  US08/207,080
• Time in Patent Office: 546 Days
• Field of Search: 73/517 R, 73/517 B, 73/518, 73/493
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/123 by piezo-resistive elements, e.g. semiconductor strain gauges
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

An acceleration sensor has a proof mass attached by resilient elements, in the form of micromechanical components, in a monocrystalline silicon layer of an SOI (silicon-on-insulator) substrate, the insulator layer of the substrate being removed under the structure which is susceptible to acceleration, in order to enable free mobility of the micromechanical components. Piezoresistors are provided for detecting movement of the proof mass, the piezoresistors supplying electrical signals to an evaluation circuit.

Claims

1. An acceleration sensor comprising:

a silicon-on-insulator substrate having a monocrystalline silicon layer and an insulator layer;

a proof mass consisting of silicon doped so as to be electrically conductive and at least one resilient element formed in said silicon layer, said at least one resilient element extending between and electrically connecting said proof mass and a remainder of said silicon layer;

said insulator layer having an opening therein in which said proof mass and said at least one resilient element are disposed, said proof mass and said at least one resilient element being freely movable within said opening; and

said substrate having a plurality of regions disposed opposite said proof mass which are doped so as to be electrically conductive, said proof mass and said regions of said substrate forming, in combination, a plurality of capacitors with each capacitor having a first electrode and a second electrode, said proof mass forming each first electrode and said regions of said substrate respectively forming the second electrodes, said capacitors comprising means for generating an electrical signal corresponding to movement of said proof mass from a quiescent position due to inertial forces acting on said proof mass resulting from acceleration of said substrate for determining the magnitude of said acceleration.

2. An acceleration sensor comprising:

a silicon-on-insulator substrate having a monocrystalline silicon layer and an insulator layer;

a proof mass consisting Of silicon doped so as to be electrically conductive and at least one resilient element formed in said silicon layer, said at least one resilient element extending between and electrically connecting said proof mass and a remainder of said silicon layer;

said insulator layer having an opening therein in which said proof mass and said at least one resilient element are disposed, said proof mass and said at least one resilient element being freely movable within said opening, said silicon layer being disposed in a plane and said acceleration mass being movable in said plane of said silicon layer; and

said substrate having a plurality of regions disposed opposite said proof mass which are doped so as to be electrically conductive, said proof mass and said regions of said substrate forming, in combination, a plurality of capacitors, each capacitor having first and second electrodes, said first electrodes comprising a plurality of finger-shaped electrodes extending from said proof mass and said second electrodes comprising a plurality of cooperating finger-shaped electrodes extending from said remainder of said silicon layer, said plurality of capacitors comprising means for generating an electrical signal corresponding to movement of said proof mass from a quiescent position due to internal forces acting on said proof mass resulting from acceleration of said substrate for determining the magnitude of said acceleration.

3. An acceleration sensor as claimed in claim 2 wherein said electrodes extending from said proof mass are disposed at opposite sides of said proof mass and wherein said electrodes of said proof mass have a longitudinal direction, wherein said cooperating finger-shaped electrodes are disposed at said remainder of said silicon layer at said opposite sides of said proof mass, and wherein said at least one resilient element is disposed for permitting movement of said proof mass in said opening of said insulator layer along said longitudinal direction of said electrodes.

4. An acceleration sensor as claimed in claim 2 wherein said finger-shaped electrodes of said proof mass are disposed at opposite sides of said proof mass and wherein said electrodes of said proof mass have a longitudinal direction, wherein said at least one resilient element is arranged to permit movement of said proof mass in a direction perpendicular to said longitudinal direction, wherein said silicon layer is disposed in a plane, and wherein said finger-shaped electrodes at said silicon layer are disposed on opposite sides of said proof mass and are disposed relative to said electrodes of said proof mass to form respective capacitors in a direction perpendicular to the longitudinal direction of said electrodes of said proof mass.

5. A method for manufacturing an acceleration sensor comprising the steps of:

providing a silicon-on-insulator substrate having a monocrystalline silicon layer and an insulating layer;

forming a structure including a proof mass and at least one resilient element in said silicon layer of said SOI substrate, said at least one resilient element extending between said proof mass and a remainder of said silicon layer;

removing a region of said insulator layer beneath said proof mass and said at least one resilient element to permit free mobility of said proof mass and said at least one resilient element in said region from a quiescent position due to a force of inertia acting on said proof mass resulting from acceleration of said substrate; and

forming a plurality of capacitors each having a first capacitor electrode movable with said proof mass and a second capacitor electrode attached to said remainder of said silicon layer.

6. A method as claimed in claim 5 wherein the step of forming said plurality of capacitors is further defined by forming a plurality of interdigital capacitors.

7. A method as claimed in claim 5 wherein the step of forming a structure in said silicon layer is further defined by forming a microstructure in said silicon layer including said proof mass and said at least one resilient element.